Fluorine-contained films with high water-repel Sency and transparency prepared by RF plasma-enhanced CVD

摘要

Surface modification of materials is often.performed by using plasma, but there are very few trials to modify the surface to keep high water-repellency and transparency [1]. The most common water-repellent treatment is to spread a fluoropolymer or fluoro-alkyl silane (FAS) on a substrate and prepare a water-repellent film. This method has a burning process carried out at about 350 °C and cannot be applied to low heat resistant substrates like resins. Moreover, such problems as inferiority in transparency and weakness in adhesion between film and substrate still remain in this technique, because with the FAS coating method it is hard to obtain strong chemical bonding between an alkoxy function and a hydroxy function on the surface of glass, and the film gradually comes off [2,3].