High-Quality AlGaN Layers over Pulsed Atomic-Layer Epitaxially Grown AlN Templates for Deep Ultraviolet Light-Emitting Diodes

摘要

In this paper, we report the pulsed atomic-layer epitaxy (PALE) of ultrahigh-quality AlN epilayers over basal-plane sapphire substrates and their use as templates to grow high-quality AlGaN layers with Al content ranging from 0.3 to 1. Symmetric/asymmetric x-ray diffraction (XRD) and room-temperature (RT) photoluminescence (PL) measurements were used to establish the high-structural and optical quality. The XRD (002) and (114) rocking-curve full-width at half-maximum (FWHM) values of the PALE-grown AlN epilayers were less than 60 arcsec and 250 arcsec, respectively. Using these ultrahigh-quality layers as templates, Si-doped AlGaN lauyers with a large Al content from 30% to 100% were grown and used for milliwatt power sub-280-nm, deep-ultraviolet (UV) light-emitting diodes (LEDs).