Abrasive removal depth for polishing a sapphire wafer by a cross-patterned polishing pad with different abrasive particle sizes

摘要

The paper establishes a new theoretical model for abrasive removal depth for polishing a sapphire wafer using chemical mechanical polishing with a polishing pad that has a cross pattern. The theoretical model uses binary image pixel division to calculate the pixel polishing times. An abrasive contact model for single-pixel multiple abrasive particles, to estimate the contact force between a single abrasive particle and the wafer, is then established. When the contact force is calculated, it is possible to calculate the abrasive depth of a single abrasive particle on the surface of the sapphire wafer. Using this theoretical model, carring a numerical simulation with a slurry of the same concentration, but with different abrasive particle diameters, determines the removal volume and average abrasive removal depth at each pixel position and the surface condition of the wafer. The simulation result is also compared with experimental data, in order to verify that the new model is feasible.