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IEEE International Conference on Micro Electro Mechanical Systems
IEEE International Conference on Micro Electro Mechanical Systems
召开年:
2013
召开地:
Taipei(CT)
出版时间:
-
会议文集:
-
会议论文
热门论文
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1.
Multi-material paper-disc devices for low cost biomedical diagnostics
机译:
用于低成本生物医学诊断的多材料纸碟设备
作者:
Vereshchagina E.
;
Bourke K.
;
Meehan L.
;
Dixit C.
;
Glade D.Mc
;
Ducree J.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2013年
2.
An innovative sample-to-answer polymer lab-on-a-chip with on-chip reservoirs for the POCT of thyroid stimulating hormone (TSH)
机译:
创新的从样品到答案的聚合物片上实验室,带有用于甲状腺刺激激素(TSH)POCT的片上储存器
作者:
Jung W.
;
Han J.
;
Kai J.
;
Lim J.-Y.
;
Sul D.
;
Ahn C.H.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2013年
3.
2-Dimensional near-field millimeter-wave scanning with micromachined probe for skin cancer diagnosis
机译:
微机探针二维近场毫米波扫描,用于皮肤癌诊断
作者:
Topfer Fritzi
;
Dudorov Sergey
;
Oberhammer Joachim
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2013年
4.
All-in-one droplet platform for multiplexed genetic detection in blood
机译:
多合一液滴平台用于血液中的多重基因检测
作者:
Zhang Yi
;
Wang Tza-Huei
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2013年
5.
Endoscopic optical probes for linear and rotational scanning
机译:
用于线性和旋转扫描的内窥镜光学探头
作者:
Weber N.
;
Zappe H.
;
Seifert A.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2013年
6.
Conformally integrated stent cell resonators for wireless monitoring of peripheral artery disease
机译:
整合整合的支架细胞共振器,用于无线监测周围动脉疾病
作者:
Viswanath Anupam
;
Green Scott R.
;
Kosel Jurgen
;
Gianchandani Yogesh B.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2013年
7.
3D Parylene sheath probes for reliable, long-term neuroprosthetic recordings
机译:
3D聚对二甲苯鞘探针可进行可靠的长期神经修复录音
作者:
Kuo J.T.W.
;
Kim B.J.
;
Hara S.A.
;
Lee C.D.
;
Yu L.
;
Gutierrez C.A.
;
Hoang T.Q.
;
Pikov V.
;
Meng E.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2013年
8.
Low-power, self-contained, reciprocating micropump through electrolysis and catalyst-driven recombination toward drug delivery applications
机译:
通过电解和催化剂驱动的重组实现低功率,独立的往复式微型泵,用于药物输送应用
作者:
Portilla J.Marcial
;
Kim Unyoung
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2013年
9.
Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators
机译:
UHF微机械延伸葡萄酒玻璃环谐振器的虚假模式抑制
作者:
Yuan Xie
;
Sheng-Shian Li
;
Yu-Wei Lin
;
Zeying Ren
;
Nguyen C.T.-C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical resonators;
interference suppression;
UHF oscillators;
UHF filters;
spurious mode suppression;
UHF micromechanical resonator;
extensional wine-glass ring resonators;
geometry-specific excitation;
micromechanical oscillator;
filter circuits;
wireless transceivers;
1.47 GHz;
406.7 MHz;
418 MHz;
419 MHz;
10.
From zero- to second-level packaging of RF-MEMS devices
机译:
从RF-MEMS器件的零到二级包装
作者:
Jourdain A.
;
Vaesen K.
;
Scheer J.M.
;
Weekamp J.W.
;
van Beek J.T.M.
;
Tilmans H.A.C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microwave devices;
chip scale packaging;
flip-chip devices;
soldering;
hermetic seals;
semiconductor device packaging;
zero-level packaging;
second-level packaging;
RF-MEMS devices;
0-level packaging;
1-level packaging;
2-level packaging;
Philips PASSI process;
solder bonding,;
flip-chip aligner;
flip-chip bonder;
atmospheric pressure;
chip-scale-package;
solder balls;
individual 1-level assemblies;
RF-board;
RF measurements;
insertion loss;
0-level package hermeticity;
mechanical resonators;
hermetic seal;
240 C;
11.
Bubble jet printhead with integrated polyimide nozzle plate
机译:
泡泡喷射打印头与集成聚酰亚胺喷嘴板
作者:
Lindemann T.
;
Ashauer H.
;
Goettsche T.
;
Sandmaier H.
;
Yu Y.
;
Peters R.P.
;
Sassano D.
;
Bellone A.
;
Scardovi A.
;
Zengerle R.
;
Koltay P.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
laser beam machining;
micromachining;
ink jet printers;
bubbles;
nozzles;
computational fluid dynamics;
bubble jet printhead;
integrated polyimide nozzle plate;
standard printhead substrate;
3D structured polyimide nozzle plate;
three layer assembly;
thick nozzle plate;
fluidic channels;
laser structured layers;
adhesive layer;
printhead geometry;
3D computational fluid dynamics simulations;
heater geometry;
12.
Multi-step sequential batch self-assembly of three-dimensional micro-structures using magnetic field
机译:
使用磁场的三维微结构的多步顺批量自组装
作者:
Iwase E.
;
Shimoyama I.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
self-assembly;
nanostructured materials;
nanotechnology;
magnetic fields;
ferromagnetic materials;
torque;
sensitivity;
magnetomechanical effects;
multistep sequential batch self assembly;
3D ferromagnetic microstructures;
magnetic field;
magnetic torque;
micro hinged structures;
nondimensional factor;
hinged structures lifting;
13.
Single-mask, high aspect ratio, 3D micromachining of bulk titanium
机译:
单掩模,高纵横比,散装钛的3D微机芯
作者:
Rao M.P.
;
Aimi M.F.
;
Parker E.R.
;
MacDonald N.C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromachining;
sputter etching;
micromirrors;
masks;
lithography;
titanium;
3D micromachining;
bulk titanium;
high aspect ratio structures;
arbitrary surface height profile;
reactive ion etching lag;
single lithographic masking;
mask pattern opening;
etch depth variation;
surface height variation;
etched floor;
electrode structure;
bulk micromachined titanium micromirror devices;
Ti;
14.
Single-mask reduced-gap capacitive micromachined devices
机译:
单掩模减少间隙电容微机械设备
作者:
Abdolvand R.
;
Ayazi F.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical devices;
micromachining;
masks;
sputter etching;
photolithography;
reduced-gap micromachined devices;
single mask capacitive micromechanical devices;
dry-etched deep-submicron gaps;
thick oxide mask layer;
gap-reduction technique;
optical lithography;
DRIE recipes;
batch fabrication;
single crystal silicon resonators;
SOI substrates;
resonator structures;
Q values;
15.
A cochlear electrode array with built-in position sensing
机译:
具有内置位置感测的耳蜗电极阵列
作者:
Wans J.
;
Gulari M.
;
Bhatti P.T.
;
Arcand B.Y.
;
Beach K.
;
Friedrich C.R.
;
Wise K.D.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
hearing aids;
ear;
prosthetics;
biomedical electrodes;
microelectrodes;
piezoresistive devices;
biosensors;
thin films;
cochlear electrode array;
built-in position sensing;
modiolus-hugging thin film electrode array;
cochlear prosthesis;
embedded sensor;
piezo-resistive polysilicon position sensor;
array position;
wall contact output signal;
thin film array substrate;
16.
Active ink-jet nozzles equipped with arrayed visual sensors for parallel alignment control
机译:
有源喷墨喷嘴配备有用于并联对准控制的排列的视觉传感器
作者:
Hoshino K.
;
Nagai T.
;
Mita Y.
;
Sugiyama M.
;
Matsumoto K.
;
Shimoyama I.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
CMOS image sensors;
microlenses;
position control;
ink jet printers;
nozzles;
active inkjet nozzles;
arrayed visual sensors;
parallel alignment control;
smart inkjet nozzle array;
multilayer patterning;
functional materials;
mechanically moving actuator;
landing position;
waveform patterns;
fluorescent dye;
built-in microlenses;
CMOS image sensor;
flexible substrates;
2 micron;
17.
Polyurethane rubber as a MEMS material: characterization and demonstration of an all-polymer two-axis artificial hair cell flow sensor
机译:
聚氨酯橡胶作为MEMS材料:所有聚合物双轴人造毛细胞流量传感器的表征和示范
作者:
Engel J.M.
;
Chen J.
;
Bullen D.
;
Liu C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microsensors;
rubber;
conducting polymers;
thermal resistance;
elastic moduli;
adhesion;
mechanical testing;
carbon;
polyurethane rubber;
MEMS material;
two axis artificial hair cell flow sensor;
two part room temperature curing;
polyurethane elastomer;
chemical resistance;
thermal degradation;
elastic modulus;
polydimethylsiloxane;
elastic performance;
adhesion performance;
solvent resistance;
force sensitive resistors;
vertical polyurethane cantilever hair;
cilium;
C;
18.
Geometry dependent sensitivity of planar piezoresistive stress sensors based on the pseudo-Hall effect
机译:
基于伪霍尔效应的平面压阻式应力传感器几何依赖性灵敏度
作者:
Doelle M.
;
Magery D.
;
Ruther P.
;
Paul O.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
electric sensing devices;
piezoresistive devices;
piezoresistance;
Hall effect;
stress measurement;
sensitivity analysis;
geometry dependent sensitivity;
planar piezoresistive stress sensor;
pseudo Hall effect;
geometry parameters;
aspect ratio;
input contact size;
output contact size;
active device area;
finite element method;
insulating holes;
19.
Electrolytic patterning of dissolved oxygen microgradients during cell culture
机译:
溶解氧微耕的电解图案化细胞培养物
作者:
Park J.H.
;
Bansal T.
;
Chueh B.H.
;
Takayama S.
;
Maharbiz M.M.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
biological tissues;
microelectrodes;
cellular biophysics;
electrolysis;
fluorescence;
colorimetry;
oxygen;
electrolytic patterning;
dissolved oxygen microgradients;
cell culture;
microsystem;
microelectrodes;
permeable membrane;
electrolysis;
microgradient profiles;
fluorescent data;
colorimetric data;
aqueous solution;
C2C12 rat myoblasts;
20.
A monolithic integrated array of out-of-plane hot-wire flow sensors and demonstration of boundary-layer flow imaging
机译:
单片集成阵列外平面热线流量传感器和边界层流动成像的示范
作者:
Chen J.
;
Engel J.
;
Chen N.
;
Liu C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
anemometers;
boundary layer turbulence;
operational amplifiers;
flow measurement;
monolithic integrated array;
out-of-plane hot wire flow sensors;
boundary layer flow imaging;
3D assembly;
JFET operational amplifier;
constant temperature mode;
airflow;
hot wire anemometer array;
21.
Modular assembly/packaging of multi-substrate microsystems (WIMS Cube) using thermo-magnetically actuated cables
机译:
使用热磁致动电缆的多衬底微系统(WIMS立方体)的模块化组装/包装
作者:
Ucok A.B.
;
Giachino J.M.
;
Najafi K.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
semiconductor device packaging;
semiconductor device manufacture;
actuators;
modular construction;
electric connectors;
micromechanical devices;
multi-substrate microsystems modular assembly;
multi-substrate microsystems modular packaging;
thermo-magnetically actuated cables;
wireless integrated microsystems;
electrical signals;
fluidic signals;
integrated flexible parylene cables;
thermo-magnetic actuation;
magnetic field;
resistive heating;
0.1 T;
22.
A 1.14GHz piezoelectrically transduced disk resonator
机译:
1.14GHz压电转导的盘谐振器
作者:
Le Yan
;
Man Wu
;
Tang W.C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical resonators;
circuit tuning;
silicon-on-insulator;
Q-factor;
piezoelectric transducers;
UHF devices;
piezoelectrically transduced disk resonator;
electrostatic frequency tuning capability;
anchor loss suppression;
split-top electrodes;
electromechanical coupling;
minimizing motional resistance;
SOI wafers;
6-mask process;
post-CMOS compatibility;
quality factors;
atmospheric pressure;
1.14 GHz;
30 micron;
23.
Multi-user hybrid process platform for MEMS devices using silicon-on-insulator wafers
机译:
MEMS设备使用绝缘体晶圆的MEMS器件的多用户混合过程平台
作者:
Lin P.
;
Boysel R.M.
;
Boysel M.
;
Winters M.
;
Hawkins W.
;
Kubby J.
;
Gulvin P.
;
Diehl J.
;
Feinberg K.
;
German K.
;
Herko L.
;
Jia N.
;
Ma J.
;
Meyers J.
;
Nystrom P.
;
Wang Y.R.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromachining;
micromechanical devices;
silicon-on-insulator;
etching;
diffraction gratings;
optical switches;
micromirrors;
actuators;
multi user hybrid process platform;
MEMS devices;
silicon-on-insulator wafers;
bulk micromachining process;
13-mask process;
doped polysilicon layer;
single crystal silicon layer;
MEMS design;
doping;
etching;
microsystems designs;
optical gratings;
SCS layer dimples;
SCS layer anchors;
thermal actuators;
hinges;
latches;
optical switches;
mirrors;
waveguides;
24.
Creating polymer-based microstructures with various aspect ratios from a single template for cellular force measurements
机译:
从单个模板中产生基于聚合物的微结构,用于蜂窝力测量
作者:
Zhao Y.
;
Yu H.
;
Zhang X.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
replica techniques;
moulding;
force measurement;
polymer structure;
tissue engineering;
micromechanical devices;
polymer based microstructures fabrication;
single template;
cellular force measurements;
probing ranges;
multiple master templates;
focal adhesion enhancement;
cell alignment;
1-to-n replication;
25.
Fully integrated nanoresonator system with attogram/Hz mass resolution
机译:
全集成的纳米管系统具有识别/ Hz质量分辨率
作者:
Worsen E.
;
Abadal G.
;
Nilsson S.G.
;
Verd J.
;
Sandberg R.
;
Svendsen W.
;
Teva J.
;
Perez-Murano F.
;
Esteve J.
;
Figueras E.
;
Campabadal F.
;
Montelius L.
;
Barniol N.
;
Boisen A.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical resonators;
nanotechnology;
CMOS integrated circuits;
electron beam lithography;
nanoresonator system;
mass resolution;
complementary metal oxide semiconductor chips;
higb sensitivity mass sensing;
electrostatic actuation;
capacitive read-out;
low energy electron beam lithography;
direct write laser lithography;
radiation sensitive CMOS;
1 to 1.6 mHz;
14.8 kHz;
26.
Towards a versatile DRIE: silicon pit structures combined with electrochemical etch stop
机译:
朝着多功能的Drie:硅坑结构与电化学蚀刻停止结合
作者:
Kurzawski P.
;
Salo T.
;
Hierlemann A.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
surface mount technology;
microsensors;
sputter etching;
etching;
CMOS integrated circuits;
semiconductor device manufacture;
silicon pit structures;
electrochemical etch stop;
deep reactive ion etching;
membrane based sensors;
sensor arrays;
grid like mask pattern;
uniform size etch openings;
silicon membranes;
CMOS wafer processing;
27.
Vacuum packaged low noise gyroscope with sub mdeg/s//spl radic/Hz resolution
机译:
真空封装低噪声陀螺仪,具有SPL Radic / Hz分辨率
作者:
June-Young Lee
;
Seung-Hoon Jeon
;
Hyoung-Kyoon Jung
;
Hyun-Kee Chang
;
Yong-Kweon Kim
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
gyroscopes;
microsensors;
Q-factor;
micromechanical devices;
electron device noise;
silicon;
vacuum packaged low noise gyroscope;
vacuum packaged z-axis gyroscope;
lateral vibrating gyroscope;
metal interlaid SiOG technology;
high aspect ratio silicon structures;
quality factor;
bias stability;
150 micron;
Si;
28.
On-chip microdialysis system with in-line sensing capabilities
机译:
芯片上微型系统,具有在线传感功能
作者:
Yi-Cheng Hsieh
;
Zahn J.D.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
patient monitoring;
biomedical electrodes;
biosensors;
microelectrodes;
biomembranes;
osmosis;
on-chip microdialysis system;
inline sensing;
sensing electrodes;
membrane bonding;
microfluidic channel;
surface-volume ratio;
biosensor integration;
miniaturization;
analyte recovery;
analyte concentration;
continuous monitoring;
glucose permeability;
salt ions;
29.
Size-dependent bubble dynamics in a microchannel heat sink
机译:
微通道散热器中的大小依赖泡沫动力学
作者:
Siu Lun Cheung L.
;
Man Lee
;
Yi-Kuen Lee
;
Man Wong
;
Zohar Y.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
bubbles;
microfluidics;
semiconductor-insulator-semiconductor devices;
heat sinks;
nucleation;
temperature sensors;
nanotechnology;
bubble dynamics;
microchannel heat sink;
height effect;
nucleation site;
channel height;
temperature sensors;
anodic bonding technology;
silicon surface;
bubble formation;
wall temperature;
glass wafer;
bubble activity;
growth rate;
departure size;
release frequency;
30.
A liquid-based gravity-driven etching-stop technique and its application to wafer level cantilever thickness control of AFM probes
机译:
基于液体的重力驱动蚀刻 - 停止技术及其在AFM探针的晶圆级悬臂厚度控制中的应用
作者:
Wei-Chih Lin
;
Chao-Chiun Liang
;
Ching-Hsiang Tsai
;
Gen-Wen Hsieh
;
Lung-Jieh Yang
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
thickness control;
etching;
atomic force microscopy;
micromechanical devices;
potassium compounds;
iodine compounds;
liquid based gravity driven etching stop technique;
wafer level cantilever thickness control;
atomic force microscope probes;
opposite etching trenches;
depth rulers;
probe chips;
trench depth;
KOH etchant;
probe handles;
diiodomethane;
wet etching;
KOH;
31.
300nm-thick cantilever in PDMS for tactile sensing
机译:
300nm厚的悬臂,用于触觉传感的PDMS
作者:
Noda K.
;
Hoshino K.
;
Matsumoto K.
;
Shimoyama I.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
tactile sensors;
piezoresistive devices;
piezoresistance;
deformation;
piezoresistive cantilever;
PDMS;
tactile sensor;
shear stress;
one directional deformation;
cantilever resistance;
300 nm;
32.
Design, fabrication, and characterization of electrical and fluidic interconnections for a multi-chip microelectrofluidic bench
机译:
多芯片微电流板凳的电气和流体互连的设计,制造和表征
作者:
Sang Do Suk
;
Sunghwan Chang
;
Young-Ho Cho
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
integrated circuit interconnections;
electric resistance;
electrical interconnections;
fluidic interconnections;
multichip microelectrofluidic bench;
I/O interconnections;
electrical resistance;
pressure drop;
flow rates;
33.
High-temperature compatible nickel silicide thermometer and heater for catalytic chemical microreactors
机译:
高温兼容镍硅化物温度计和加热器,用于催化化学微量反应器
作者:
Jensen S.
;
Quaade U.J.
;
Hansen O.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
resistance thermometers;
electric heating;
high-temperature electronics;
microsensors;
temperature measurement;
chemical reactors;
nickel compounds;
nickel silicide thermometer;
nickel silicide heater;
catalytic chemical microreactors;
agile and accurate control;
thermal reaction measurement;
microfabricated chemical reactors;
temperature sensors;
heterogeneous catalytic conversion;
thermally activated catalytic conversion;
NiSi/sub 2/;
CO;
CO/sub 2/;
34.
Arrayed liquid rotor electret power generator systems
机译:
阵列液体转子驻极体发电机系统
作者:
Boland J.S.
;
Messenger J.D.M.
;
Lo K.W.
;
Tai Y.C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
electric generators;
small electric machines;
rotors;
electrets;
liquid rotor electret power generators;
LEPG devices;
Teflon-electret capacitors;
serial array;
parallel array;
impedance matching;
air-filled gaps;
liquid droplets;
35.
Fully-differential poly-SiC Lame mode resonator and checkerboard filter
机译:
全差分多SiC Lame模式谐振器和棋盘滤波器
作者:
Bhave S.A.
;
Di Gao
;
Maboudian R.
;
Howe R.T.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
resonators;
micromechanical resonators;
Q-factor;
VHF filters;
band-pass filters;
silicon compounds;
Lame mode resonator;
checkerboard filter;
RF MEMS resonator;
fully-differential electrode configuration;
capacitive feedthrough;
electromechanical quality factor;
ohmic resistance;
band-pass filter;
pass-band ripple;
110 KHz;
173 MHz;
SiC;
36.
Study of injection-locking phenomenon using MEMS tunable laser
机译:
使用MEMS可调激光注射锁定现象研究
作者:
Zhang X.M.
;
Zhang J.B.
;
Liu A.Q.
;
Chollet F.
;
Hao J.Z.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
semiconductor lasers;
micromechanical devices;
laser mode locking;
laser tuning;
MEMS tunable laser;
laser injection-locking phenomenon;
atomic clock;
all-optical networks;
coherent communications;
injection locking laser device;
master laser;
Fabry-Perot multimode laser;
wavelength tuning range;
locking quality;
optical response;
optically-controlled optical switching;
wave mixing;
50 MHz;
37.
Bidirectional electrostatic linear shuffle motor with two degrees of freedom
机译:
双向静电线性洗牌电机,具有两度自由度
作者:
E. Sarajlic
;
E. Berenschot
;
H. Fujita
;
G. Krijnen
;
M. Elwenspoek
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
38.
Photonic crystal tuned by cantilever
机译:
由悬臂调整的光子晶体
作者:
Takahata T.
;
Hoshino K.
;
Matsumoto K.
;
Shimoyama I.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
photonic crystals;
optical waveguides;
optical tuning;
electron beam lithography;
sputter etching;
finite difference time-domain analysis;
2D slab photonic crystal reflectors;
AFM cantilever;
air holes;
triangular lattice;
silicon air-bridge waveguide;
optical reflectors;
photonic band gap;
finite difference time domain method;
PhC reflectors;
electron beam lithography;
deep reactive ion etching;
39.
SU-8 lift-off patterned silicone chemical vapor sensor arrays
机译:
SU-8剥离图案硅胶化学蒸气传感器阵列
作者:
Wong V.T.S.
;
Huang A.
;
Chih-Ming Ho
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
chemical sensors;
micromachining;
polymers;
silicones;
carbon compounds;
SU-8 lift-off patterned silicone;
chemical vapor sensor array;
chemical vapor sensor fabrication;
micromachined silicone-carbon black sensor;
room temperature vulcanizing polymers;
RTV polymers;
mask;
silicon wafer;
alcohol;
acetone;
25 micron;
5 sec;
40.
Mechanical effects of attaching protein layers on nanoscale-thick cantilever beams for resonant detection of virus particles
机译:
附着蛋白质层对纳米级厚悬臂梁的机械效应进行共振检测病毒粒子
作者:
Gupta A.
;
Akin D.
;
Bashir R.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical resonators;
pressure sensors;
beams (structures);
proteins;
biosensors;
nanotechnology;
protein layer attachment;
nanoscale-thick cantilever beams;
resonant detection;
virus particles;
stiffness constant;
silicon cantilever beams;
initial unloaded spring constant value;
resonant frequency;
41.
Thin-film paddle microresonators with high quality factors fabricated at temperatures below 110 /spl deg/C
机译:
薄膜桨叶微生物,在110 / SPL DEG / C的温度下制造的高质量因子。
作者:
Gaspar J.
;
Adrega T.
;
Chu V.
;
Conde J.P.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical resonators;
micromachining;
Q-factor;
thin films;
glass;
substrates;
thin film paddle microresonators;
quality factors;
silicon micromachined paddle resonators;
glass substrates;
microelectromechanical structures;
optical setup;
resonance frequencies;
electrostatic excitation;
resonance peaks;
deflection spectrum;
Si;
42.
Transfer of metal MEMS packages using a wafer-level solder sacrificial layer
机译:
使用晶片级焊料层转印金属MEMS包装
作者:
Welch W.C. III
;
Khalil Najafi
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical devices;
semiconductor device packaging;
wafer bonding;
encapsulation;
soldering;
metal MEMS packages;
wafer-level solder sacrificial layer;
wafer level encapsulation;
electroplated caps;
carrier wafer;
solder transfer method;
transient liquid phase bonding;
solder transfer layer dewetting;
nickel-tin TLP bonding;
lead-tin transfer solder layer;
0-level MEMS packaging;
43.
High power handling RF MEMS design and technology
机译:
高功率处理RF MEMS设计和技术
作者:
Grenier K.
;
Dubuc D.
;
Ducarouge B.
;
Conedera V.
;
Bourrier D.
;
Ongareau E.
;
Derderian P.
;
Plana R.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microwave switches;
microswitches;
power handling;
RF microelectromechanical switches;
self actuation;
electromigration;
failure mechanisms;
RF power;
MEMS topology;
cold switching;
8 W;
44.
A dual axis gas gyroscope utilizing low-doped silicon thermistor
机译:
一种采用低掺杂硅热敏电阻的双轴气体陀螺仪
作者:
Dau V.T.
;
Shiozawa T.
;
Dao D.V.
;
Kumagai H.
;
Sugiyama S.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
gyroscopes;
thermistors;
sensors;
micromechanical devices;
ships;
silicon;
low-doped silicon thermistor;
semiconductor gas gyroscope;
piezoelectric pump;
micro thermal sensing element;
ship anti-rolling system;
ship stabilization systems;
dual-axis gas gyroscope;
14 mm;
25 mm;
45.
On-chip temperature gradient liquid chromatography
机译:
片上温度梯度液相色谱
作者:
Shih C.Y.
;
Chen Y.
;
Xie J.
;
He Q.
;
Tai Y.C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
chromatography;
micromechanical devices;
electrochemical sensors;
proteins;
thermal engineering;
on-chip temperature gradient liquid chromatography;
MEMS temperature-programmable high pressure parylene column;
integrated thermal isolation;
electrochemical sensor;
high performance liquid chromatography;
HPLC device fabrication;
derivatized amino acid sample;
thermal performance;
46.
A novel fabrication method for hybrid, microfluidic devices
机译:
一种用于杂交,微流体装置的新型制造方法
作者:
Steinert C.P.
;
Schmitt N.
;
Deier E.
;
Daub M.
;
deHeij B.
;
Zengerle R.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
soft lithography;
moulding;
nozzles;
hybrid microfluidic devices;
disposable microfluidic systems;
24 channel picoliter dispenser;
microarray fabrication;
TopSpot printheads;
hybrid disposable assembly;
PDMS multilayer;
silicon nozzle chip;
perfectly sealed high density fluidic interconnects;
soft lithography;
sandwich molding;
47.
FULLY-DIFFERENTIAL POLY-SIC LAME-MODE RESONATOR AND CHECKERBOARD FILTER
机译:
全差分多SiC跛行模式谐振器和棋盘滤波器
作者:
Sunil A. Bhave
;
Di Gao
;
Roya Maboudian
;
Roger T. Howe
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
48.
Fabrication and characterization of an integrated thermal microsystem
机译:
集成热微系统的制造与表征
作者:
Man Lee
;
Siu Lun Cheung L.
;
Yi-Kuen Lee
;
Man Wong
;
Zohar Y.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microsensors;
pressure sensors;
temperature sensors;
wafer bonding;
etching;
temperature distribution;
integrated thermal microsystem;
pressure microsensors;
temperature microsensors;
convective boiling;
uniform heat flux boundary condition;
wafer bond technology;
etch back technology;
heat source;
temperature sensors;
pressure sensors;
fluid flow;
thermal boundary conditions;
temperature distributions;
boiling curves;
two phase flow;
boiling plateau;
critical heat flux;
time-dependent pressure signals;
single liquid phase flow;
temperature measurements;
pressure measurements;
49.
Using compliant membranes for dynamic flow stabilization in microfluidic systems
机译:
使用柔顺膜进行微流体系统中的动态流动稳定
作者:
Bozhi Yang
;
Metier J.L.
;
Qiao Lin
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
membranes;
flow instability;
flow control;
compliant membranes;
dynamic flow stabilization;
microfluidic systems;
fluctuating fluid flow;
microchannel;
vibrations;
outlet flow rates;
inlet pressures;
lumped-parameter model;
flow rate stabilization ratio;
50.
Multithermal DNA micro-array chip for rapid DNA melting temperature measurement and advanced SNP discrimination
机译:
用于快速DNA熔化温度测量和高级SNP歧视的多线地DNA微阵芯片
作者:
Petronis S.
;
Ganzhorn D.T.
;
Christensen C.B.V.
;
Dufva M.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
temperature measurement;
melting;
micromachining;
microfluidics;
polymorphism;
DNA;
molecular biophysics;
DNA micro-array chip;
DNA melting;
temperature measurement;
SNP discrimination;
micromachined device;
multiplex single nucleotide polymorphisms;
microfluidic system;
probes;
51.
Using feedback control and micro-fluidics to steer individual particles
机译:
使用反馈控制和微流体来引导单个粒子
作者:
Armani M.
;
Chaudhary S.
;
Probst R.
;
Shapiro B.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
feedback;
time-varying systems;
feedback control;
microfluidics;
spatially complex time-varying fluid flow;
yeast cell;
particle steering;
52.
Active positioning control of single cell/microbead in a micro-well array chip by dielectrophoresis
机译:
通过介电泳微孔阵列芯片中单电池/微珠的主动定位控制
作者:
Byoung-Gyun Kim
;
Kwang-Seok Yun
;
Euisik Yoon
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical devices;
nanopositioning;
micropositioning;
biological techniques;
cellular biophysics;
electrophoresis;
active positioning control;
single cell;
micro-well array chip;
dielectrophoresis;
prototype chip;
concept feasibility;
silicon substrate;
PDMS channel structures;
single polystyrene microbead;
15 micron;
10 V;
1 MHz;
53.
MICROFABRICATED SPHERICAL BI-CONVEX QUARTZ CRYSTAL MICROBALANCE ARRAY
机译:
微制造球形双凸石英晶微观阵列
作者:
Li Li
;
Takashi Abe
;
Masayoshi Esashi
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
54.
Vertical capacitive SiBARs
机译:
垂直电容性Sibars.
作者:
Pourkamali S.
;
Ho G.K.
;
Ayazi F.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
bulk acoustic wave devices;
acoustic microwave devices;
acoustic resonators;
Q-factor;
UHF devices;
resonators;
vertical capacitive SiBARs;
high frequency SiBARs;
vertical silicon bulk acoustic resonators;
resonator structures;
HARPSS fabrication process;
high frequency capacitive resonators;
quality factors;
resonant frequency;
55.
Micromachined capacitive transducer arrays for intravascular ultrasound imaging
机译:
用于血管内超声成像的微机动电容传感器阵列
作者:
Guldiken R.O.
;
Levent Degertekin F.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
ultrasonic transducer arrays;
biomedical ultrasonics;
plasma CVD;
capacitive micromachined ultrasonic transducer;
CMUT arrays;
forward looking intravascular ultrasound imaging;
plasma enhanced chemical vapor deposition;
vacuum sealing;
electronics integration;
electrical characterization;
acoustic characterization;
volumetric imaging;
synthetic aperture image reconstruction;
10 to 20 MHz;
250 C;
40 micron;
120 micron;
1 mm;
56.
A PMMA-based micro pressure sensor chip using carbon nanotubes as sensing elements
机译:
基于PMMA的微压传感器芯片,使用碳纳米管作为传感元件
作者:
Fung C.K.M.
;
Zhang M.Q.H.
;
Chan R.H.M.
;
Li W.J.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
pressure sensors;
microsensors;
polymers;
carbon nanotubes;
PMMA-based micro pressure sensor chip;
carbon nanotubes;
bulk multi-walled carbon nanotube;
piezoresistive sensing elements;
polymethylmethacrylate;
SU8 molding/hot-embossing technique;
AC electrophoretic manipulation;
pressure-resistance dependency;
MWNT-based micro sensors;
I-V measurements;
electrical current heating;
resistance-off set calibration;
polymer substrates;
bio-compatibility applications;
low-cost applications;
300 micron;
57.
High speed microfluidic doublet flow in open pools driven by non-contact micromachined thermal sources
机译:
高速微流体双层流量在非接触式微机械源驱动的开放池中
作者:
Basu A.S.
;
Gianchandani Y.B.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
micromachining;
flow visualisation;
nanopatterning;
microfluidic doublet flow;
open pools;
noncontact micromachined thermal sources;
micromachined heat source;
liquid surface;
linear velocity;
rotational velocity;
polystyrene beads;
flow visualization;
polyimide cantilever;
liquid temperature;
air gap;
heater;
1D probe array;
flow pattern;
0 to 32 mW;
3 micron;
50 to 100 micron;
58.
Fabrication of and signal recording from lipid membrane sensors
机译:
脂膜传感器的制造和信号记录
作者:
Kuwana Y.
;
Tamada Y.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
biosensors;
biomembranes;
lipid bilayers;
field effect transistors;
proteins;
transducers;
signal recording;
lipid membrane sensor;
biosensor;
insect receptor proteins;
field effect transistor;
FET transducer;
lipid bilayer membrane;
membrane potential changes;
stimulus-receptor interaction;
optical microscopy;
membrane capacitance measurement;
simulated membrane potential;
59.
REAL-TIME MONITORING OF A SELECTIVE FILTER USING MICROCHIP FLOW CYTOMETRY INTEGRATED POLYMER WAVEGUIDES
机译:
使用微芯片流式细胞术集成聚合物波导的选择性滤波器的实时监测
作者:
Z. Wang
;
P. K. Petersen
;
A. Rogeberg
;
J. P. Kutter
;
D. D. Bang
;
A. Wolff
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
60.
A world-to-chip microfluidic interconnection technology with dual functions of sample injection and sealing for a multichamber micro PCR chip
机译:
一种世界片上微流体互连技术,具有样品喷射和密封的双函数,用于多巯基微PCCR芯片
作者:
Oh K.W.
;
Chinsung Park
;
Kak Namkoong
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
biological techniques;
seals (stoppers);
leak detection;
biochemistry;
world-to-chip microfluidic interconnection technology;
sample injection;
sealing;
multichamber micro PCR chip;
polymerase chain reaction chip;
leakage test;
zero leakage flow;
biochemical compatibility;
pipettes;
100 C;
30 min;
61.
Flexible stamp for nanoimprint lithography
机译:
纳米压印光刻的灵活印章
作者:
Nielsen T.
;
Pedersen R.H.
;
Hansen O.
;
Haatainen T.
;
Tolkki A.
;
Ahopelto J.
;
Kristensen A.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
nanolithography;
soft lithography;
replica techniques;
moulding;
micromachining;
nanoimprint lithography;
flexible silicon stamp;
bulk semiconductor micro machining;
thick anchor like imprint areas;
bending stiffness;
parallelism;
pressing tool;
wafer quality;
imprint depth;
polymer residual layer thickness;
4 in;
Si;
62.
Cryogenic imaging x-ray spectrometer
机译:
低温成像X射线光谱仪
作者:
Wiegerink R.J.
;
van Baar J.J.
;
de Boer J.H.
;
Ridder M.L.
;
Bruijn M.P.
;
Germeau A.
;
Hoevers H.F.C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
X-ray spectrometers;
X-ray imaging;
calorimeters;
image sensors;
superconducting transitions;
micromachining;
cryogenic imaging X-ray spectrometer;
microcalorimeter array;
superconducting transition-edge sensors;
XEUS mission;
bulk micromachining;
surface micromachining;
X-ray Evolving Universe Spectroscopy;
1024 pixels;
25 pixels;
63.
Nanocomposite effects on the coefficient of thermal expansion modification for high performance electro-thermal microactuator
机译:
纳米复合材料对高性能电热微致动器热膨胀改性系数的影响
作者:
Li-Nuan Tsai
;
Cheng Y.-T.
;
Wensyang Hsu
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
nanocomposites;
microactuators;
electroplated coatings;
thermal expansion;
nanoparticles;
nanocomposite effects;
coefficient of thermal expansion modification;
electro-thermal microactuator;
low temperature stress free electroplated nickel process;
uniformly dispersed nanoparticles;
diamond;
thermal expansion coefficient;
mechanical properties of nickel;
reliability improvement;
nanopowders;
mechanical strength enhancement;
intrinsic characteristics;
nanoparticle;
MEMS;
Ni;
C;
SiO/sub 2/;
64.
A novel micro counter-stream-mode oscillating-flow (COSMOS) heat-pipe
机译:
一种新型微量反流式振荡流(宇宙)热管
作者:
Sugimoto M.
;
Minai K.
;
Uemura M.
;
Nishio S.
;
Tabata O.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromachining;
heat transfer;
thermal conductivity;
heat pipes;
micro counter-stream-mode oscillating-flow;
COSMOS heat-pipe;
thin heat spreader;
silicon micromachining;
Si groove;
piezoelectric type pumps;
temperature gradient;
heat transport rate;
thermal conductivity;
20 W;
65.
LINEAR MICROMOTORS AND SPATIAL MICROMECHANISMS BASED ON UV-LIGA
机译:
基于UV-LIGA的线性微电机和空间微机械
作者:
W.-J. Cheng
;
D. L. DeVoe
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
66.
Micropumping by directional growth and hydrophobic venting of bubbles
机译:
通过定向生长和气泡疏水通风微调
作者:
De-Sheng Meng
;
Chang-Jin Kim
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
67.
Integrated on-line microdevice for proteomics
机译:
蛋白质组学集成在线微型微型
作者:
Tabuchi M.
;
Baba Y.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
biological specimen preparation;
proteins;
molecular biophysics;
microfluidics;
online microdevice;
proteomics;
protein analysis;
cell culture;
pretreatment procedures;
electrophoresis separation;
pipetting;
centrifugation;
cell washing;
protein extraction;
protein assay;
pump;
68.
SINGLE-CHIP ATOMIC FORCE MICROSCOPE
机译:
单芯片原子力显微镜
作者:
S. Hafizovic
;
T. Volden
;
D. Barrettino
;
K.-U. Kirstein
;
A. Hierlemann
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
69.
An electrostatically latching thermopneumatic microvalve with closed-loop position sensing
机译:
具有闭环位置感测的静电锁定热气体微型阀
作者:
Potkay J.A.
;
Wise K.D.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microvalves;
pneumatic drives;
electrostatic actuators;
pneumatic actuators;
electrostatically latching thermopneumatic microvalve;
closed-loop position sensing;
thermopneumatic drive;
actuation mechanisms;
heater grid;
thermopneumatic actuator;
electrostatic actuator;
valve position;
electrostatic hold mechanism;
thermopneumatic pressure;
10 micron;
200 mW;
130 Torr;
1 s;
70.
Biomolecular image sensor of bacteriorhodopsin patterned by electrodeposition
机译:
电沉积图案化的细分图像传感器
作者:
Takamatsu S.
;
Hoshino K.
;
Matsumoto K.
;
Miyasaka T.
;
Shimoyama I.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
image sensors;
electrodeposition;
proteins;
molecular biophysics;
biomolecular image sensor;
bacteriorhodopsin;
electrodeposition;
retinal membrane protein;
bR photoreceptor;
bR pumps protons;
light irradiation;
light intensity;
photoelectric response;
charge amplifier;
hydrophilic surface modification;
hydrophobic surface modification;
71.
A die-scale micromachining process for bulk PZT and its application to in-plane actuators
机译:
用于散装PZT的模级微机械加工过程及其在平面内执行器的应用
作者:
Tao Li
;
Gianchandani Y.B.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
piezoceramics;
micromachining;
photolithography;
electroplating;
ultrasonic machining;
mica;
glass;
microactuators;
die-scale micromachining process;
bulk PZT;
in-plane actuators;
bulk ceramics;
lithography;
electroplating;
batch mode micro electro-discharge machining;
batch mode micro ultrasonic machining;
/spl mu/USM;
LEEDUS;
die-scale pattern transfer capability;
lithographic masks;
SEDUS;
serial /spl mu/EDM;
glass-mica ceramic plate;
Macor ceramic plate;
octagonal spiral shaped in-plane actuator;
20 micron;
25 micron;
34 micron;
40 V;
72.
MEMS RELIABILITY: METRO LOGY SET-UP FOR INVESTIGATION OF FATIGUE CAUSES
机译:
MEMS可靠性:METRO LOGY设置,用于调查疲劳原因
作者:
Olivier Millet
;
Olivier Blanrue
;
Bernard Legrand
;
Dominique Collard
;
Lionel Buchaillot
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
73.
Tube shape piezoelectric 2D microscanner for minimally invasive laser treatment
机译:
管状压电2D microscanner用于微创激光处理
作者:
Akahori H.
;
Wada H.
;
Esashi M.
;
Haga Y.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
laser applications in medicine;
micro-optics;
optical scanners;
piezoelectric 2D microscanner;
minimally invasive laser treatment;
laser scanning micro tool;
optical fiber;
micro rod lens;
piezoelectric unimorph cantilevers;
endoscope;
polymer tube;
74.
Adhesion and contact resistance in an electrostatic MEMS microswitch
机译:
静电MEMS微动开关中的粘附性和接触电阻
作者:
Majumder S.
;
McGruer N.E.
;
Adams G.G.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microswitches;
contact resistance;
adhesion;
electrostatic devices;
plastic deformation;
elastic deformation;
contact resistance;
electrostatic MEMS microswitch;
multi-asperity model;
elastic deformation;
plastic deformation;
adhesion resistance;
constrictive resistance;
discrete distribution;
asperity heights;
contact force characteristics;
surface profile;
actuation voltage;
75.
New fatigue damage evaluation of MEMS materials under tension-compression cyclic loading
机译:
张力压缩循环载荷下MEMS材料的新疲劳损伤评价
作者:
Isono Y.
;
Kito H.
;
Kikuchi T.
;
Shimazu T.
;
Katayama M.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
fatigue;
tensile testing;
compressive testing;
bending;
micromechanical devices;
silicon;
MEMS materials;
tension-compression cyclic loading;
full-reversed bending fatigue tester;
cyclic fatigue damage evaluation;
micro fatigue tester;
bending fatigue testing procedure;
fatigue lives;
microscale single crystal silicon specimens;
tensile stress;
compressive stress;
cantilevers;
76.
Spiral-tube parylene intraocular pressure sensor
机译:
螺旋管聚糖眼压传感器
作者:
Po-Jui Chen
;
Rodger D.
;
Yu-Chong Tai
;
Humayun M.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
pressure sensors;
micromechanical devices;
prosthetics;
patient monitoring;
intraocular pressure sensor;
biocompatible pressure sensor;
all-mechanical pressure sensor;
micromachined pressure sensor;
spiral-tube structure;
parylene process;
passive sensor;
zero power consumption;
pressure variation;
optical observation;
eye implantation;
intraocular spiral rotation;
sensing technology;
glaucoma patients;
1 mm;
77.
A vertically guided MEMS probe card with deeply recessed trench-type cantilever
机译:
垂直引导的MEMS探针卡,具有深深的凹槽型悬臂
作者:
Bong-Hwan Kirn
;
Doo-Yun Chung
;
Chi-Hwan Chung
;
Tae-Un Chun
;
Seon-Ho Seok
;
Hyeon-Cheol Kim
;
Kukjin Chun
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical devices;
contact resistance;
leakage currents;
sputter etching;
probes;
vertically guided MEMS probe card;
trench type cantilever;
contact resistance measurement;
leakage current;
fine pitch;
cantilever beam;
RIE silicon etching;
50 micron;
78.
A low cost wafer-level MEMS packaging technology
机译:
低成本晶圆级MEMS包装技术
作者:
Monajemi P.
;
Ayazi F.
;
Joseph P.J.
;
Kohl P.A.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical devices;
electronics packaging;
encapsulation;
wafer-level MEMS packaging;
low-temperature packaging;
wafer-level encapsulation;
thermal decomposition;
sacrificial polymeric material;
polymer overcoat cap;
surface micromachined structure;
bulk micromachined structure;
silicon-on-insulator resonators;
thick silicon gyroscopes;
thick silicon accelerometers;
79.
Determining the strength of micro-beams without measuring forces or displacements
机译:
在不测量力或位移的情况下确定微束的强度
作者:
Elata D.
;
Hirshberg A.
;
Naftali M.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
beams (structures);
micromechanical devices;
test equipment;
mechanical strength;
mechanical testing;
failure (mechanical);
micro-beam strength;
brittle micro beams;
80.
TEM observation of tensile deformation of silicon nanowire between micromachined sharp opposing tips
机译:
微机械尖锐相对尖端硅纳米线拉伸变形的TEM观察
作者:
Ishida T.
;
Kakushima K.
;
Mita M.
;
Fujita H.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
nanowires;
transmission electron microscopy;
electrostatic actuators;
deformation;
TEM observation;
tensile deformation;
silicon nanowires;
single-crystalline silicon nanowire;
microfabricated silicon probe tips;
integrated electrostatic microactuators;
I-V characteristics;
81.
DESIGN AND FABRICATION OF A MICROFLUID ANGULAR RATE SENSOR
机译:
微流体角速率传感器的设计与制造
作者:
Jian Zhou
;
Guizhen Yan
;
Yong Zhu
;
Zhiyong Xiao
;
Jie Fan
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
82.
Characterization of acoustic vibration modes at GHz frequencies in bulk acoustic wave resonators by combination of scanning laser interferometry and scanning acoustic force microscopy
机译:
通过扫描激光干涉测量和扫描声学力显微镜组合散块声波谐振器GHz频率的声学振动模式
作者:
Liu X.
;
San Paulo A.
;
Park M.
;
Bokor J.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
acoustic resonators;
bulk acoustic wave devices;
micromechanical resonators;
light interferometry;
atomic force microscopy;
vibrations;
acoustic vibration modes;
GHz frequencies;
bulk acoustic wave resonators;
scanning laser interferometry;
scanning acoustic force microscopy;
RF resonators;
film bulk acoustic resonator;
vibration amplitude mapping;
vibration image decomposition;
mode shape reconstruction;
dynamic visualization;
dispersion curve measurement;
83.
Silicon profile transformation and sidewall roughness reduction using hydrogen annealing
机译:
硅轮廓变换和侧壁粗糙度使用氢退火减少
作者:
Lee M.M.
;
Yao J.
;
Wu M.C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
optical waveguides;
annealing;
silicon-on-insulator;
nanotechnology;
crystal microstructure;
surface roughness;
mass transfer;
silicon;
hydrogen;
silicon profile transformation;
sidewall roughness reduction;
hydrogen annealing;
3D profile transformation;
microstructures;
silicon-on-insulator substrates;
single crystalline microspheres;
micropillars;
circular cantilever beams;
mass transport process;
temperature parametric dependence;
pressure parametric dependence;
submicrometer single mode optical waveguides;
optical loss;
0.26 nm;
1 micron;
Si;
84.
Self-aligned vertical electrostatic comb drives for scanning micromirrors
机译:
用于扫描微镜的自对准垂直静电梳状驱动器
作者:
Tsou C.
;
Lin W.T.
;
Fan C.C.
;
Chou B.C.S.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromirrors;
silicon-on-insulator;
optical fabrication;
electrostatic comb drives;
scanning micromirrors;
multilayer SOI process;
aligned masks;
SOI-MEMS fabrication methods;
self-aligned vertical comb drives;
10.46 KHz;
450 micron;
60 V;
85.
Micro/nano glass press molding using silicon carbide molds fabricated by silicon lost molding
机译:
使用硅损坏成型制造的微/纳米玻璃压榨模具
作者:
Min K.-O.
;
Tanaka S.
;
Esashi M.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micro-optics;
compression moulding;
high-temperature techniques;
micromachining;
surface roughness;
photolithography;
surface treatment;
silicon compounds;
micro glass press molding;
nano glass press molding;
silicon carbide molds;
silicon lost molding;
micro optics;
photolithography;
etching;
SiC ceramic block;
SiC film;
nickel interlayer;
nitric acid;
hydrofluoric acid;
surface roughness;
optical uses;
diamond-like carbon;
SiC-SiC bonding;
1.2 nm;
400 C;
900 C;
SiC;
Ni;
86.
Manipulation of whole blood using traveling wave dielectrophoresis
机译:
使用旅行波介电泳操纵全血
作者:
Lo Y.J.
;
Wo A.M.
;
Lei U.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
blood;
electrophoresis;
biological techniques;
channel flow;
microfluidics;
biomedical measurement;
patient diagnosis;
whole blood;
traveling wave dielectrophoresis;
blood manipulation;
2D electrodes;
sinusoidal wave;
blood bulk flow;
bidirection motion;
flow channel;
10 MHz;
87.
Stiction-free cantilevers with rounded cross-section
机译:
无圆形悬臂与圆形横截面
作者:
Dae-Hvun Kim
;
Jin-Wan Jeon
;
Sung-Il Chang
;
Koeng Su Lim
;
Jun-Bo Yoon
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromachining;
micromechanical devices;
stiction;
surface tension;
stiction free cantilevers;
rounded cross section;
Laplace pressure force;
contact areas;
stiction reduction;
rigidity;
metal cantilever;
conventional wet releasing process;
1 micron;
6 micron;
60 micron;
125 micron;
1000 micron;
88.
A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold
机译:
低压推挽式SPDT RF MEMS开关通过电磁驱动和静电保持的组合操作
作者:
Il-Joo Cho
;
Taeksang Song
;
Sang-Hyun Baek
;
Euisik Yoon
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microswitches;
electrostatic actuators;
microwave switches;
low-power electronics;
low-voltage push-pull SPDT switch;
RF MEMS switch;
electromagnetic actuation;
electrostatic hold;
torsion bars;
static power consumption;
actuation voltage;
lifetime test;
single pole double throw;
4.3 V;
89.
Wafer-level vacuum package with vertical feedthroughs
机译:
晶圆级真空包装,具有垂直馈通
作者:
Junseok Chae
;
Giachino J.M.
;
Najafi K.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micromechanical devices;
semiconductor device packaging;
hermetic seals;
flip-chip devices;
wafer level vacuum package;
vertical feedthroughs;
MEMS vacuum package;
glass substrate;
wafer level processing;
vacuum capability;
hermetic capability;
flip chip solder attachment;
PC board;
integrated micro Pirani gauge;
silicon cap;
0.6 mtorr;
100 torr;
90.
Parylene etching techniques for microfluidics and bioMEMS
机译:
微流体和生物素的聚丙烯蚀刻技术
作者:
Meng E.
;
Yu-Chong Tai
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microfluidics;
sputter etching;
polymer films;
polymerisation;
vapour deposited coatings;
carbon;
parylene etching;
microfluidics;
bioMEMS;
parylene C;
thermoplastic polymers;
crystalline polymers;
parylene films;
vapor deposition polymerization coating;
dry etching;
oxygen based plasmas;
plasma etching;
deep reactive ion etching;
high aspect ratio;
91.
A nanoimprinted strain-induced reconfigurable polymer micro-optical grating
机译:
纳米压印应变诱导的可再配置聚合物微光学光栅
作者:
Yi-Chung Tung
;
Kurabayashi K.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
micro-optics;
diffraction gratings;
soft lithography;
elastomers;
micromechanical devices;
nanoimprinted polymer;
strain-induced reconfigurable polymer;
micro-optical grating;
organic elastomer;
polydimethylsiloxane;
programmed mechanical strain;
nanoimprinted PDMS grating;
electrostatic MEMS actuators;
silicon chip;
multi-level soft-lithographic lift-off and grafting;
soft lithography;
silicon micromachined device;
PDMS/silicon hybrid device;
miniaturized grating-based instruments;
92.
Stretch-and-positioning of single stranded DNA as a template for molecular construction
机译:
单链DNA的拉伸和定位作为分子结构的模板
作者:
Kobayashi T.
;
Washizu M.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
nanotechnology;
self-assembly;
DNA;
biological techniques;
single stranded DNA;
molecular construction template;
self assembly;
DNA stretching;
DNA immobilization;
93.
Integrated process control for highly parallel and contact-free micro array printing
机译:
用于高平行和无接触式微阵列打印的集成过程控制
作者:
Niekrawietz R.
;
Honstein W.
;
Gutmann O.
;
de Heij B.
;
Daub M.
;
Zengerle R.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
microsensors;
microfluidics;
flow control;
microassembling;
printing;
pressure sensors;
process control;
microactuators;
integrated process control;
contact-free microarray printing;
highly parallel noncontact dispenser;
microarray production;
pneumatically actuated dispenser;
transient pressure pulse;
droplet ejection;
viscosity;
surface tension;
density;
integrated pressure sensor;
flooded actuation chamber;
empty printhead nozzles;
microarray fabrication;
94.
Fabrication of circular diaphragm for piezoelectric acoustic devices
机译:
压电声器件圆隔膜的制造
作者:
Woon Seob Lee
;
Yong Chul Kim
;
Jin Seung Lee
;
Seok Woo Lee
;
Lee S.S.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
piezoelectric devices;
acoustic transducers;
etching;
diaphragms;
boron;
circular diaphragm;
piezoelectric acoustic devices;
fabrication method;
boron etching stop method;
acoustic transducers;
general rectangular diaphragm;
2 mm;
1 micron;
95.
Acoustic differential amplifier based on acoustic FET
机译:
基于声学FET的声学差分放大器
作者:
Tanaka M.
;
Sakashita T.
;
Konishi S.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
differential amplifiers;
MOSFET;
micromechanical devices;
operational amplifiers;
silicon;
acoustic differential amplifier;
acoustic FET;
acoustic systems;
MEMS-based acoustic components;
electronic circuits;
active acoustic circuits;
MEMS technology;
electronic differential amplifier;
operational amplifier;
polyimide membrane;
Si structure;
Si;
96.
A passive micro gas regulator for hydrogen flow control
机译:
用于氢气控制的无源微气调节器
作者:
Debray A.
;
Nakakubo T.
;
Ueda K.
;
Mogi S.
;
Shibata M.
;
Fujita H.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
97.
A flow-rate independent cell counter using a fixed control volume between double electrical sensing zones
机译:
一种流量独立的单元计数器,使用双电感测区域之间的固定控制量
作者:
Dong Woo Lee
;
Soyeon Yi
;
Young-Ho Cho
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
biosensors;
microsensors;
biomedical equipment;
cellular biophysics;
flow rate;
cell counter;
control volume;
electrical sensing zones;
cell concentration;
cell numbers;
hemacytometer;
98.
Low-stress, heavily-doped polycrystalline silicon carbide for MEMS applications
机译:
低应力,重掺杂的多晶硅碳化物,用于MEMS应用
作者:
Trevino J.
;
Xiao-An Fu
;
Mehregany M.
;
Zorman C.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
semiconductor thin films;
micromechanical devices;
CVD coatings;
internal stresses;
electrical resistivity;
silicon compounds;
ammonia;
low stress polycrystalline silicon carbide;
heavily doped polycrystalline silicon carbide;
MEMS applications;
poly-SiC films;
low pressure chemical vapor deposition;
dichlorosilane;
acetylene;
precursors;
ammonia;
dopant gas;
tensile residual stress;
Young modulus;
bulk micromachined membranes;
surface micromachined resonators;
suspended microbridges;
chemical durability;
thermal durability;
900 C;
SiC;
SiH/sub 2/Cl/sub 2/;
99.
Micromachining/nanotechnology in direct methanol fuel cell
机译:
直接甲醇燃料电池中的微机械线/纳米技术
作者:
Sakaue E.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
关键词:
fuel cells;
micromachining;
nanotechnology;
micromechanical devices;
secondary cells;
micromachining;
nanotechnology;
direct methanol fuel cell;
power generating system;
portable electronic devices;
rechargeable battery;
MEMS;
100.
Bidirectional electrostatic linear shuffle motor with two degrees of freedom
机译:
双向静电线性洗牌电机,具有两度自由度
作者:
Sarajlic E.
;
Berenschot E.
;
Fujita H.
;
Krijnen G.
;
Elwenspoek M.
会议名称:
《IEEE International Conference on Micro Electro Mechanical Systems》
|
2005年
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