A low-voltage push-pull SPDT RF MEMS switch operated by combination of electromagnetic actuation and electrostatic hold

摘要

In this paper, we have proposed and fabricated a new push-pull type SPDT switch implemented in a single structure with torsion bars actuated by the combination of electromagnetic and electrostatic forces for low power and low voltage operation. The proposed switch is actuated by using large electromagnetic force at low voltage to change its state and is held to maintain its state by electrostatic force to reduce static power consumption. From the prototype, actuation voltage is measured as 4.3V and required energy is below 15.4/spl mu/J per each switching. Also, we have successfully carried out a lifetime test over more than 166 million cycles without significant degradation of switch characteristics.