optical waveguides; annealing; silicon-on-insulator; nanotechnology; crystal microstructure; surface roughness; mass transfer; silicon; hydrogen; silicon profile transformation; sidewall roughness reduction; hydrogen annealing; 3D profile transformation; microstructures; silicon-on-insulator substrates; single crystalline microspheres; micropillars; circular cantilever beams; mass transport process; temperature parametric dependence; pressure parametric dependence; submicrometer single mode optical waveguides; optical loss; 0.26 nm; 1 micron; Si;
机译:氢热退火以在绝缘体上硅上进行3-D轮廓转换并减少侧壁粗糙度
机译:使用SiO2硬掩模和基于氟的干法刻蚀可降低侧壁粗糙度的低损耗硅波导
机译:利用液化自完美超快和选择性地降低硅波导侧壁粗糙度
机译:硅退火和氢退火降低侧壁粗糙度
机译:感应耦合等离子体中的硅,二氧化硅和铌酸锂的侧壁轮廓和蚀刻机制。
机译:具有表面粗糙度的硅MEMS摩擦的描述:随机Prandtl–Tomlinson模型的优点和局限性以及振动引起的摩擦减小的模拟
机译:在氢气中进行热退火以在绝缘体上硅上进行3-D轮廓转换并降低侧壁粗糙度