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REDUCTION OF ROUGHNESS ON A SIDEWALL OF AN OPENING
REDUCTION OF ROUGHNESS ON A SIDEWALL OF AN OPENING
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机译:减少开口侧壁上的粗糙度
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摘要
Methods, apparatuses, and systems related to reduction of roughness on a sidewall of an opening are described. An example method includes forming a liner material on a first sidewall of an opening in a first silicate material and on a second sidewall of the opening in an overlying second silicate material, where the liner material is formed to a thickness that covers a roughness on the first sidewall extending into the opening. The example method further includes removing the liner material from the first sidewall of the opening and the second sidewall of the opening with a non-selective etch chemistry to reduce the roughness on the first sidewall.
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