Yangtze Delta Region Institute of Tsinghua University;
Jiaxing 314000.P.R. China;
State Key Laboratory of Laser Technology;
Huazhong University of Science and Technology;
Wuhan 430074;
P.R. China;
反应离子蚀刻; 侧壁平滑度; CHF3/O2等离子体; 硅基二氧化硅; 条形波导; 制造技术;