AZO THIN FILMS SYNTHESIZED BY RF-MAGNETRON SPUTTERING: THE ROLE OF DEPOSITION POWER

摘要

Transparent c-axis textured aluminum doped zinc oxide (AZO) films were deposited at room temperature onto glass substrates by radio-frequency magnetron sputtering. The effect of sputtering power on the properties of the AZO sputtered thin films was investigated. Our results indicated that the sputtering power has a great influence on the crystalline quality and electrical parameters of AZO films, thus being a useful tool for tuning their functional properties.