AZO thin films synthesized by rf-magnetron sputtering: the role of deposition power

摘要

Transparent c-axis textured aluminum doped zinc oxide (AZO) films weredeposited at room temperature onto glass substrates by radio-frequency magnetronsputtering. The effect of sputtering power on the properties of the AZO sputtered thinfilms was investigated. Our results indicated that the sputtering power has a greatinfluence on the crystalline quality and electrical parameters of AZO films, thus being auseful tool for tuning their functional properties.