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Reliability of nickel flip chip bumps with a tin-silver encapsulation on a copper/tin-silver substrate during the bonding process

机译:在键合过程中,在铜/锡银基板上使用锡银封装的镍倒装芯片凸块的可靠性

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摘要

This study focused on the feasibility of using Ni flip chip bumps with a Sn-2.5Ag (wt.%) solder encapsulation. The interfacial reaction and die shear property of the Ni flip chip bump with a Sn-Ag solder cap bonded on the electroplated Cu/Sn-Ag substrate were investigated with increasing bonding time. After bonding for 1 s (Cu_xNi_(1-x))_6Sn_5 and Cu_6Sn_5 intermetallic compound (IMC) layers were formed at the upper and lower interfaces, respectively, with the former IMC being the predominant phase during bonding. The transformation of the solder cap into the (Cu_xNi_(1-x))_6Sn_5 IMC depleted the solder after bonding for 30 s, and then the Ni concentration in the IMC gradually decreased with increasing bonding time. The shear property peaked after 30 s, and then decreased with increasing bonding time. The fractures occurred at the solder/Cu6Sn_5 interface and inside the (Cu_x Ni_(1-x))_6Sn_5 IMC after bonding for 1 s and 30 s, respectively, after which the fracture location shifted toward the (Ni_xCu_(1-x))_3Sn_4/(Cu_x Ni_(1-x))_6Sn_5 interface with increasing bonding time.
机译:这项研究集中于使用具有Sn-2.5Ag(wt。%)焊料封装的Ni倒装芯片凸点的可行性。随着焊接时间的增加,研究了在电镀的Cu / Sn-Ag衬底上结合了Sn-Ag焊料盖的Ni倒装芯片凸点的界面反应和芯片剪切性能。结合1 s(Cu_xNi_(1-x))_ 6Sn_5和Cu_6Sn_5的金属间化合物(IMC)层分别形成在上下界面上,前者的IMC是结合过程中的主要相。焊接30 s后,焊锡帽向(Cu_xNi_(1-x))_ 6Sn_5 IMC的转化耗尽了焊料,然后IMC中的Ni浓度随着焊接时间的增加而逐渐降低。剪切性能在30 s后达到峰值,然后随着粘结时间的增加而下降。分别在键合1 s和30 s后在焊料/ Cu6Sn_5界面和(Cu_x Ni_(1-x))_ 6Sn_5 IMC内部发生断裂,此后断裂位置移向(Ni_xCu_(1-x)) _3Sn_4 /(Cu_x Ni_(1-x))_ 6Sn_5接口具有增加的键合时间。

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