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The thermal cycling reliability of copper pillar solder bump in flip chip via thermal compression bonding

机译:倒装芯片中铜柱焊料凸点通过热压键合的热循环可靠性

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摘要

In this paper, the thermal-mechanical reliability of flip chip on board (FCOB) with copper pillar solder joint is investigated. By increasing the temperature and time of the thermal compression bonding (TCB) process, the copper pillar solder joint with intermetallic compound (IMC) as the main body is obtained. Then the Cu pillar/Sn-Ag/Cu pad and Cu pillar/IMC/Cu pad joint structures are carried out the thermal cycling test separately. It is observed that the crack of the Sn-Ag solder joint caused by ductile fracture, which is leaded by fatigue and then extension through microvoids caused by creep. And the crack of IMC joint is mainly caused by the brittle fracture along the Cu6Sn5 and Cu3Sn phase interface. At the same time, two constitutive of viscoplasticity and elastic-plastic-creep and life prediction models are compared. The effect of underfill on the thermal-mechanical reliability of copper pillar solder joint is evaluated by comparing the underfills filled with different weight ratio filler particles.
机译:本文研究了带有铜柱焊点的倒装板上FCOB的热机械可靠性。通过增加热压键合(TCB)工艺的温度和时间,可以获得以金属间化合物(IMC)为主体的铜柱焊点。然后分别进行铜柱/ Sn-Ag /铜垫和铜柱/ IMC /铜垫的接头结构。观察到,由于疲劳导致的Sn-Ag焊点的裂纹是由疲劳引起的,然后由于蠕变而延伸穿过微孔。而IMC接头的裂纹主要是由于沿Cu6Sn5和Cu3Sn相界面的脆性断裂引起的。同时,比较了粘塑性和弹塑性蠕变的两个本构模型和寿命预测模型。通过比较填充有不同重量比的填充剂颗粒的底部填充剂,可以评估底部填充剂对铜柱焊点热机械可靠性的影响。

著录项

  • 来源
    《Microelectronics & Reliability》 |2020年第1期|113543.1-113543.12|共12页
  • 作者

  • 作者单位

    Cent S Univ State Key Lab High Performance Complex Mfg Changsha 410083 Peoples R China;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Flip chip; Copper pillar bump; IMC bump; Thermal cycling; Underfill;

    机译:倒装芯片;铜柱凸点;IMC颠簸;热循环;底胶;
  • 入库时间 2022-08-18 05:18:48

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