Improvement in fatigue property for a PZT ferroelectric film device with SRO electrode film prepared by chemical solution deposition

摘要

PZT films with (100) and (110) orientation were prepared by spin coating using the chemical solution deposition (CSD) method on an SRO/Si or a Pt/Ti/SiO_2/Si substrate. The remnant polarization and the saturation polarization of the PZT/SRO/Si film were 21 and 35 μC/cm~2, and those of the PZT/Pt/Ti/SiO_2/Si film were 20 and 31 μC/cm~2. The remnant polarization of the PZT/SRO/Si film maintained more than 10~8 switching cycles, and the fatigue property was observed for the PZT film fabricated on the Pt/Ti/SiO_2/Si electrode.