PbZr{sub}0.53Ti{sub}0.47O{sub}3 (PZT) thin films on la{sub}0.5Sr{sub}0.5CoO{sub}3 (LSCO) bottom electrodes prepared by chemical solution deposition and annealed at different temperatures

摘要

PbZr{sub}0.53Ti{sub}0.47O{sub}3 (PZT) films on La{sub}0.5Sr{sub}0.5CoO{sub}3 (LSCO)/Pt electrodes crystallize in the perovskite phase at 550°C. Cross section SEM shows a columnar grain structure of PZT films on fine-grained LSCO. The ferroelectric response of the heterostructures depends on the annealing temperature of the LSCO layer. The remanent polarization and coercive field of the PZT annealed at 550°C deposited on LSCO annealed at 800 °C are 25 μC/cm{sup}2 and 99 kV/cm respectively, comparable to the values obtained for PZT films on platinized silicon substrate.