Metallo-Organic Solution Deposition of Ferroelectric PZT Films

摘要

The metallo-organic solution deposition ((MOSD) or sol-gel) technique can be usedfor preparing lead zirconate titanate (PZT) ceramics with a wide range of compositions and crystal structures for electro-optical applications. Film morphology is affected by stoichiometry of the film, hydrolysis and polymerization of the sol-gel solution, and thermal treatment of the deposited material. The lattice parameter decreases with the amount of titanium in PZT in agreement with ceramic data. A slight initial excess of lead in the coating solution is found to improve film morphology. Unlike traditional powder ceramic processing techniques, MOSD permits the growth of small uniform grains that are conductive to achieving consistent electronic and optical properties. Our results show that the properties of films prepared by the MOSD process can be tailored to meet the needs of device applications.