Growth and characterization of GaN and AlN films on (111) and (001) Si substrates

摘要

GaN and AlN films were grown on (111) and (001) Si substrates by separate admittances of trimethylgallium (or trimethylaluminum) and ammonia (NH_3) at 1000℃. A high temperature (HT) or low temperature (LT) grown AlN thin layer was employed as the buffer layer between HT GaN (or HT AlN) film and Si substrate. Experimental results show that HT AlN and HT GaN films grown on the HT AlN-coated Si substrates exhibit better crystalline quality than those deposited on the LT AlN-coated Si substrates. Transmission electron microscopy (TEM) of the HT GaN/HT AlN buffer layer/(111)Si samples shows a particular orientation relationship between the (0001) planes of GaN film and the (111) planes of Si substrate. High quality HT GaN films were achieved on (111) Si substrates using a 200 A thick HT AlN buffer layer. Room temperature photoluminescence spectra of the high quality HT GaN films show strong near band edge luminescence at 3.41 eV with an emission linewidth of ～110meV and weak yellow luminescence.