Annealing influence on recovery of electrically stressed power vertical double-diffused metal oxide semiconductor transistors

摘要

The effect of annealing on the recovery of electrically stressed power vertical double-diffused metal oxide semiconductor (VDMOS) transistors has been investigated. Behaviors of device threshold voltage and channel carrier mobility have been analyzed in terms of underlying changes in the densities of gate oxide charges and interface traps. The mechanisms responsible for the above-mentioned changes during the recovery of stressed devices have been analyzed as well. The annealing resulted in achieving stable threshold voltage and mobility, but did not ensure full recovery, as part of the stress-induced degradation remained permanent and could not be annealed. Namely, the annealing was found to enhance the neutralization of stress-induced oxide charges and the passivation of stress-induced interface traps, while the stability upon its completion resulted from the significantly decreased density of gate oxide charges and the possible balance between the processes of trap passivation and creation at the SiO2-Si interface. (C) 2015 The Japan Society of Applied Physics