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Electrode Control of SiO2 Passivated Planar Junctions

机译:SiO2钝化平面结的电极控制

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Electric fields have been applied to the surface over a planar silicon junction by means of a metallic control-ring electrode on the oxide surface. Capacitance measurements have indicated that a large, positive, immobile charge is present at or near the interface between the silicon dioxide and the silicon. An improvement in breakdown voltage occurs when the control ring is biased negatively, producing a field that opposes the field of the immobile charge. Positive control-ring voltages are shown to produce very large junction leakage currents. The leakage current is shown to be sensitive to a high-temperature reverse bias treatment and a model for this effect is suggested. Transistors with base contracts that extend over the oxide-protected collector junction are shown to have higher breakdown voltages than do those that lack the base electrode extension. This effect is consistent with the improvement in breakdown voltage found in control-ring diode measurements.
机译:借助于氧化物表面上的金属控制环电极,已在平面硅结上方的表面上施加了电场。电容测量表明,在二氧化硅和硅之间的界面处或附近存在大量的固定正电荷。当控制环带负偏压时,击穿电压就会提高,从而产生与固定电荷场相反的场。正控制环电压显示会产生很大的结漏电流。泄漏电流显示出对高温反向偏置处理敏感,并建议了对此效应的模型。已显示具有在氧化物保护的集电极结上延伸的基极收缩的晶体管比没有基极电极延伸的晶体管具有更高的击穿电压。这种效果与控制环二极管测量中击穿电压的改善是一致的。

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