Investigation of boron diffusion in polysilicon and its application to the design of p-n-p polysilicon emitter bipolar transistors with shallow emitter junctions

摘要

Ion implantation of boron into undoped polysilicon is utilized. The main goals are to characterize the diffusion of implanted boron from polysilicon, and to correlate the diffusion behavior with the electrical properties of shallow (>500 AA) p-n-p polysilicon emitter bipolar transistors. It is shown that diffusion and electrical activity problems are encountered with boron polysilicon emitters which are not present with arsenic. Base current and emitter resistance are measured on shallow p-n-p polysilicon emitter transistors, and it is shown that the use of a deliberately grown interfacial oxide layer can decrease the base current by a factor of 10 and increase the emitter resistance by a factor of around 2. Comparisons with identical n-p-n polysilicon emitter transistors show that the modeled interfacial oxide, tunneling parameters for n-p-n and p-n-p devices are inconsistent.