Temperature stable Pd ohmic contacts to p-type 4H-SiC formed at low temperatures

摘要

The formation of low resistivity Pd-based ohmic contacts to p-type 4H-SiC below 750/spl deg/C are reported herein. The electrical properties of the contacts were examined using I-V measurements and the transmission-line model (TLM) technique. Contact resistivity as a function of annealing was investigated over the temperature range of 600/spl deg/C-700/spl deg/C. The lowest contact resistivity (5.5/spl times/10/sup -5/ /spl Omega/cm/sup 2/) was obtained after annealing at 700/spl deg/C for 5 min. Atomic force microscopy of the as-deposited Pd layer showed a root-mean-square roughness of /spl sim/8 nm, while after annealing at 700/spl deg/C, agglomeration occurred, increasing the roughness to 111 nm. Auger electron spectroscopy depth profiles revealed that with annealing, interdiffusion had resulted in the formation of Pd-rich silicides. However, X-ray diffraction and Rutherford backscattering showed that the majority of the film was still (unreacted) Pd. The thermal stability and reliability of the Pd contacts were examined by aging and temperature dependence electrical tests. The contacts annealed at 700/spl deg/C were stable at prolonged heating at a constant temperature of 500/spl deg/C and they showed thermal stability in air at operating temperatures up to 450/spl deg/C. This stability was not found for contacts formed at lower temperatures of 600/spl deg/C or 650/spl deg/C.