An Improved Quasi-Saturation and Charge Model for SOI-LDMOS Transistors

摘要

In this paper, we report an accurate quasi-saturation model and a nodal charge model for silicon-on-insulator lateral double-diffused metal-oxide-semiconductor (SOI-LDMOS) transistors. First, a model of a 2-D SOI resistor under velocity saturation is developed, which is subsequently incorporated into the drift region of an LDMOS transistor to predict the quasi-saturation effect. The gate-voltage dependence of the quasi-saturation current is also modeled. Second, we propose a new nodal charge model to describe the dynamic behavior of the device. Comparisons of modeling results with device simulation data show that the proposed model is accurate over a wide range of bias. Scalability of the model with respect to the length of the drift region under the field oxide is also demonstrated. Finally, the model is validated under device self-heating conditions and by comparing it with the experimental data.