Study of Hot-Carrier-Induced Traps in Nanoscale UTBB FD-SOI MOSFETs by Low-Frequency Noise Measurements

摘要

The hot carrier (HC)-induced traps in nanoscale fully depleted ultrathin body and buried oxide nMOSFETs are investigated by low-frequency noise (LFN) measurements in the frequency and time domains. The measured noise spectra are composed of 1/f and Lorentzian-type components. The Lorentzian noise is due to either generation-recombination noise or random telegraph noise (RTN). Based on the LFN results, the effect of the HC stress on fully depleted silicon-on-insulator MOSFETs is investigated after short- and long-time stress. The capture and emission time constants responsible for the RTN noise were calculated as the average duration time of the high/low drain current state, respectively. Analysis of RTN traps detected in fresh and HC-stressed devices indicates that the RTN amplitude is uncorrelated to the trap time constants, i.e., the impact of the trap depth from the interface is masked by that of the trap location over the channel. The overall results lead to an analytical expression for the RTN amplitude, enabling to predict the RTN changes from the subthreshold to the above-threshold region.