Monolithic NMOS digital integrated circuits in 6H-SiC

摘要

We report the first digital monolithic integrated circuits in the wide bandgap semiconductor silicon carbide (SiC). These logic gates are implemented in enhancement-mode NMOS using ion implanted MOSFET's with non-self-aligned metal gates. We have fabricated and characterized inverters, NAND and NOR gates, XNOR gates, D-latches, RS flip-flops, binary counters, and half adders. All circuits operate properly from room temperature to over 300/spl deg/C.