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Experimental method for the determination of the energy distribution of stress-induced oxide traps

机译:测定应力诱发氧化物陷阱的能量分布的实验方法

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摘要

An experimental procedure for the determination of the energy distribution of oxide neutral traps is presented, showing the evolution of the stress-induced damage as a function of Fowler-Nordheim stress fluence and field. It is shown that the traps are mainly distributed around 2 eV from the oxide conduction band. Results are presented for different oxide technologies, investigating the effect of oxide nitridation and growth conditions on the trap energy distribution.
机译:提出了确定氧化物中性陷阱能量分布的实验程序,该实验程序显示了应力诱发的损伤随Fowler-Nordheim应力密度和电场的变化。结果表明,陷阱主要分布在距氧化物导带2 eV附近。给出了不同氧化物技术的结果,研究了氧化物氮化和生长条件对阱能分布的影响。

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