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On the Origin of Gate-Induced Floating-Body Effect in PD SOI p-MOSFETs

机译:PD SOI p-MOSFET中栅极感应浮体效应的起源

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This letter systematically investigates the origin of gate-induced floating-body effect (GIFBE) in partially depleted silicon-on-insulator p-type MOSFETs. The experimental results indicate that GIFBE causes a reduction in the electrical oxide field, leading to an underestimate of negative-bias temperature instability degradation. This can be partially attributed to the electrons tunneling from the process-induced partial $hbox{n}^{+}$ polygate. However, based on different operation conditions, we found that the dominant origin of electrons was strongly dependent on holes in the inversion layer under source/drain grounding. This suggests that the mechanism of GIFBE at higher voltages is dominated by the proposed anode electron injection model, rather than the electron valence band tunneling widely accepted as the mechanism for n-MOSFETs.
机译:这封信系统地研究了部分耗尽绝缘体上硅p型MOSFET的栅极感应浮体效应(GIFBE)的起源。实验结果表明,GIFBE导致电磁场减小,从而导致低估了负偏置温度不稳定性的降低。这可以部分归因于过程诱导的部分 $ hbox {n} ^ {+} $ 聚门的电子隧穿。 。然而,基于不同的操作条件,我们发现电子的主要来源强烈依赖于源/漏接地下反型层中的空穴。这表明,在较高电压下,GIFBE的机理主要由所提出的阳极电子注入模型决定,而不是作为n-MOSFET的机理广泛接受的电子价带隧穿。

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