Sealing Bump With Bottom-Up Cu TSV Plating Fabrication in 3-D Integration Scheme

摘要

A sealing bump approach for the simplification of the conventional bottom-up copper through-silicon via (TSV) plating process flow is developed to reduce the process steps and increase the throughput without sacrificing the structure integrity and electrical performance. In this approach, TSV and bump formation can be achieved simultaneously through the bottom-up plating. Results from the analysis reveal excellent electrical characteristics and quality examination, which indicate that the proposed approach may be a good candidate for the TSV fabrication in 3-D integration.