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Reticle Design for Minimizing Multiproject Wafer Production Cost

机译:掩模版设计,可最大程度地降低多项目晶圆生产成本

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Multiproject wafer (MPW) production cost is sensitive to how the chips are arranged in a reticle. In this paper, we propose a methodology for exploring the reticle floorplan design space to minimize MPW production cost. Experimental results show that our methodology often achieves double-digit cost savings. A study using MPW for volume production shows that the volume cutoff points range from a few thousand dice to tens of thousands of dice. Note to Practitioners-This paper proposes a methodology for minimizing MPW production cost via better chip placement in a reticle (called reticle floorplanning). Our methodology consists of an effective reticle floorplanning method, two simulated wafer dicing methods, two cost estimation models, and a procedure for calculating the cost assumed by each project. A design service company or a foundry can use our methodology to reduce MPW production cost and, thus, provides a more affordable and expedient service to its customers. The reticle floorplanning method and simulated wafer dicing methods employed here are the state-of-the-art. A practitioner should adapt these methods to other MPW problems such as dealing with multitechnology process, placing multiple instances of the same design in a reticle, etc. The cost models should also be revised accordingly. The cost data given in this paper should be used only for reference as mask tooling and wafer fabrication costs constantly change. The cost model proposed for calculating the production cost assumed by each project can serve as a basis for developing a fairer pricing model. The study of using MPW for low to medium-volume production is also very useful. It may help a customer deliver its product earlier to market using a low-cost fabrication program. The problem addressed in this paper becomes much simpler if the side-to-side wafer dicing constraint is removed.
机译:多项目晶圆(MPW)的生产成本对芯片在标线中的排列方式很敏感。在本文中,我们提出了一种探索掩模版平面图设计空间以最小化MPW生产成本的方法。实验结果表明,我们的方法通常可以节省两位数的成本。使用MPW进行批量生产的研究表明,体积截止点的范围从几千个骰子到数万个骰子。给从业者的注意-本文提出了一种通过在标线片中更好地放置芯片来最小化MPW生产成本的方法(称为标线片平面规划)。我们的方法包括有效的掩模版平面规划方法,两种模拟晶圆划片方法,两种成本估算模型以及用于计算每个项目承担的成本的过程。设计服务公司或铸造厂可以使用我们的方法来降低MPW的生产成本,从而为客户提供更实惠,更便捷的服务。这里采用的掩模版平面规划方法和模拟晶片切割方法是最新技术。从业人员应使这些方法适应其他MPW问题,例如处理多技术过程,将同一设计的多个实例放置在标线中等。成本模型也应相应地进行修改。本文中给出的成本数据仅供参考,因为掩模工具和晶圆制造成本会不断变化。为计算每个项目所承担的生产成本而建议的成本模型可以作为建立更公平定价模型的基础。使用MPW进行中小批量生产的研究也非常有用。它可以帮助客户使用低成本制造程序将其产品更早地推向市场。如果消除了晶圆边切割的限制,本文中解决的问题将变得更加简单。

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