工艺参数对多弧离子镀TiAlN涂层铝含量和硬度的影响

摘要

为研究不同工艺参数对多弧离子镀制备TiAlN涂层性能的影响规律,设计了L9(34)正交试验表,并通过试验研究了弧电流、衬底负偏压、氮气/氩气流量比以及腔体压强对涂层Al含量和硬度的影响规律,得到了最佳工艺参数优化组合.结果表明:影响Al含量的因素按重要性排序依次是:腔体压强、氮气/氩气流量比、衬底负偏压、弧电流.影响涂层硬度的因素按重要性排序依次是:弧电流、氮气/氩气流量比、腔体压强、衬底负偏压.%The effects of deposition parameters on aluminum content and hardness of TiAlN hard coatings by multi-arc ion plating technique are researched on. By the experiment, this paper analyzes the influence of four different factors:arc current, negative bi-as, nitrogen/argon flow ratio and cavity pressure, on Al content and hardness. The results indicate that the factors having influence on the aluminum content are cavity pressure, nitrogen/argon flow ratio, negative bias and arc current in turn, and the factors having influence on the coating hardness are arc current, nitrogen/argon flow ratio, cavity pressure and negative bias in turn.