不同粒径金刚石固结磨料抛光硫化锌晶体研究

摘要

磨粒粒径是影响抛光最重要的参数之一,是决定加工效率和工件表面质量的关键要素.采用1～3 μm、2～4 lm、3～5 μm3种粒径的金刚石固结磨料抛光垫加工硫化锌晶体,分析磨粒粒径对工件表面质量和材料去除率的影响.实验结果表明,磨粒粒径对硫化锌晶体的固结磨料抛光影响显著,随着磨粒粒径的增大,固结磨料抛光硫化锌晶体的材料去除率增大,而表面质量变差.2～4 μm金刚石固结磨料抛光垫加工硫化锌晶体可同时获得高材料去除率和优表面质量,材料去除率达到100 nm/min,表面粗糙度为4.37 nm.%The abrasive particle size is one of most important factors which affect polishing process,machining efficiency and surface quality of workpiece.The diamond fixed abrasire pads(FAP) with three kinds of particle size (1 ～ 3 μm,2～4 μm,3～5 μm) are adopted in polishing zinc sulfide crystal,and the effect of abrasive particle size on surface quality and material removal rate are investigated.The experimental results show that its particle size has a significant effect on ZnS crystal polishing.Material removal rate of zinc sulfide crystal increases with abrasive particle size increasing.However,surface quality of the workpiece becomes worse.Furthermore,2～4 μm diamond FAP can be used to simultaneously obtain a high material removal rate and good surface quality in fixed abrasive polishing process.Material removal rate is 100 nm/min,and surface roughness is 4.37 nm.