厚度对MEMS换能元薄膜电阻率的影响研究

摘要

In order to further improve the design of energy conversion components for MEMS initiating explosive device in theory, and to reduce the design error of energy conversion components in microscale, as well as to guarantee the design resistance and ignition performance of MEMS initiating explosive device, this paper theoretically analyzed the influence factors of film resistivity in microscale. And through the preparation of different material(Al、W、Cr、Ni-Cr) and different thickness of film, the film resistivity parameter of the typical metal film with different thickness was obtained, the effect rule of the scale of the resistivity in microscale was revealed, and the corresponding inflection point data was gotten.%为完善微机电系统(Micro Electro-Mechanical Systems,MEMS)火工品薄膜换能元设计理论,减小微尺度下换能元参数的设计误差,保证设计电阻及 MEMS 火工品的作用性能,理论分析了微尺度下薄膜电阻率的影响因素,采用磁控溅射进行了不同材料(Al、W、Cr、Ni-Cr)、不同微纳米厚度(<2μm)薄膜的制备,并对不同厚度薄膜的电阻率参数进行表征,揭示了微纳尺度下电阻率的尺度效应规律,获得了相应的拐点数据.