CD-Signature evaluation Evaluation using Scatterometry

摘要

The current abilities for active feedback loops to correct for various parameters challenge metrology groups to provide exact input data for these correction cycles. One of the most important feedback loops is the one that deals with the improvement of the CD (critical dimension) uniformity of structures. Here, several processes rely on exact metrology data to tackle systematic effects that either have to be overcome by finding better process conditions or compensated actively, for instance, by tuning the writer data.