A Curled-Hinge Comb Micro-Mirror Using CMO-MEMS Process

摘要

This paper presents a large displacement static-electricity curled-hinge comb micro-mirror made by a CMOS-MEMS process. A micro-spring is incorporated to reduce the stress effects and the process variation. A mirror with a size of 500um x 500um is made using three metal layers. The micro-spring made a metal layer and a poly layer with a size of 4um x 21um. The nature frequency is 727 Hz and the maximum displacement of the micro-mirror is 32um using a driving voltage of 25 volts. The process variation has been successfully reduced from 30% to 10%.