Micro-mirror structure of micro-mirror device, has contact region that is formed between mirror portions by coating process during deposition of one mirror portion on another mirror portion

摘要

The micro-mirror structure (100) has an electrode (40) that is arranged in a micro-mirror (10). The mirror portions (11,12) are provided in the micro-mirror, and are arranged on the surface portion. A contact region is formed in between the mirror portions by coating process during deposition of one mirror portion on another mirror portion. Independent claims are included for the following: (1) method for manufacturing micro-mirror structure; and (2) method for manufacturing micro-mirror device.