Mems Process Simulation and Device Analysis For an Electro-Statically Actuated Micro-Mirror

摘要

MEMS (Micro-electroMechanical Systems) are key technologies for manufacturing in many industrial regions. Today's rapid growth and commercialization of MEMS requires equally rapid product development. Virtual manufacturing, which is usually referred to as computer aided engineering (CAE), enables this repid product development especially in MEMS world, because computer simulations can address the effect of miniaturization.