Fabrication Process Comparison and Dynamics Evaluation of Electrothermal Actuators for a Prototype MEMS Safe and Arming Devices

摘要

Electrothermal actuators fabricated using the Polysilicon Multi-User MEMS Process (PolyMUMPs) and the Sandia Ultra-Planar, Multi-Level MEMS Technology 5 (SUMMiT V) have been investigated for use in integrated microelectromechanical systems (MEMS) safe and arming devices. The fabricated electrothermal actuators have been dynamically tested to determine and compare the responses of devices from both processes. Furthermore, the integration of these devices into a safe and arming device were tested and investigated for each process. Initial results indicate that the SUMMiT devices provide the most optimum results based on consistency of operation and reliability.