多台阶平板静电驱动的高占空比微镜阵列的研制

摘要

In order to obtain a micro-mirror array with large torsional angles and large sizes under limited driving voltages, a novel micro-mirror array with a multi-terraced-plate structure was proposed and demonstrated based on the Micro-optoelectro mechanical System(MOEMS). The different characteristics of the electrostatic driver between multi-terraced-plate structure and parallel-plate structure were analyzed. The key fabrication process for the multi-terraced-plate structure was researched and a bulk micro-mechanical technology was used to fabricate a micro-mirror array with the multiterraced-plate structure. The obtained micro-mirror array contaning 52 micromirrors has the size in 600 pm by 200 μm, and a high fill-factor in excess of 97%. The test results show that the micro-mirror array achieves a maximum torsional angle about 1.1° under a driving voltage of 164 V,and the multi-terraced-plate structure greatly reduces the driving voltage as compared with the traditional parallel-plate structure.%为了在限定驱动电压下获得大镜面尺寸、大扭转角度的微镜阵列,提出了一种多台阶平板静电驱动结构的微镜阵列.理论分析了多台阶平板结构与平行平板结构在静电驱动时的区别.研究了多台阶平板结构的制作工艺并采用体硅加工工艺制作了多台阶平板静电驱动的微镜阵列,获得了微镜面尺寸达到600 μm×200 μm,包含52个微镜面排布,占空比高达97％的微镜阵列.测试表明,制作的微镜面结构在驱动电压为164 V时可以实现最大1.1°的扭转角度,相对于传统的平行平板静电驱动结构大大降低了驱动电压.