Comb-drive micromirrors are becoming of interest for a broad range of lightudmanipulation applications. Due to technical reasons, some of these applications requireudpackaging of the micromirror’s optical module in ambient air. Furthermore, micromirrorsudfor picoprojectors application are required to function at high frequencies in order toudachieve high resolution images. Accordingly, a study of the energy dissipated due to theudinteraction between the moving parts of the micromirror and the surrounding air, leading toudfluid damping, is an important issue. Even if air damping has been thoroughly studied, anudextension to large air domain distortion linked to large tilting angles of torsionaludmicromirrors is still partially missing. In such situations, the flow formation turns out to beudfar more complex than that assumed in analytical models. This task is here accomplishedudby adopting three-dimensional computational fluid dynamics models; specifically, twoudmodels, holding at different length scales, are adopted to attack the problem through anudautomated dynamic remeshing method. The time evolution of the torque required toudcompensate for the fluid damping term is computed for a-specific micromirror geometry.
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