METHOD FOR MANUFACTURING AN OPTICAL MICRO-MIRROR AND MICRO-MIRROR OR MICRO-MIRROR MATRIX OBTAINED BY THIS PROCESS

摘要

The invention concerns a method for making an optical micromirror comprising a fixed part, a mobile part, with reflecting means, linked to the fixed part by articulating means. Said method is characterised in that it comprises the following steps: a) producing a stack consisting of a mechanical support (21), a first layer (22) of thermal oxidation material and at least a second layer (26) of material designed to constitute the mobile part; b) providing articulation means (27); c) producing reflecting means (29) on the second layer; d) producing the mobile part by etching at least the second layer of material; e) eliminating the thermal oxidation layer to release said mobile part. The invention is applicable to optical routing or image projection systems.