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Development of Plating Process for Micro Bump Formation - (PPT)

机译:微凸块形成的电镀过程的开发 - (PPT)

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Along with the development of packaging technologies, the requirement for bump forming process have been advanced. To correspond these requirement, we have established the high speed and high quality Cu and Sn-Ag plating chemical as W25 and TS-507 - Feature void performance: optimize the UBM condition, fine grain Sn-Ag bump Coplanarity: improvement of basic performance. By using these chemical, we can achieve the good performance for micro bump with Cu pillar structure. We are convinced that the W25 and TS-507 are the ideal candidate for Cu pillar/ micro bump technologies.
机译:随着包装技术的发展,提出了对凸块形成过程的要求。为了对应这些要求,我们已经建立了高速和高质量的Cu和Sn-Ag电镀化学品作为W25和TS-507 - 特征空隙性能:优化UBM条件,细粒度SN-AG凸块共面:提高基本性能。通过使用这些化学品,我们可以通过Cu柱结构实现微凸块的良好性能。我们相信W25和TS-507是Cu柱/微碰撞技术的理想候选者。

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