Fabrication and characterization of glass-based MEMS transformer with single layer coil structure

摘要

A single layer micro-transformer with square interwinding coil geometry has been developed. The transformers were fabricated on a high resistive glass substrate using MEMS surface micromachining. The fabricated micro-transformer was measured and compared with the simulation. Its characteristics are studied in wide range of operating frequency. As the results, Q-factor as high as 1.95, minimum insertion loss of -4.1 dB at 720 MHz and resonance frequency of 580 MHz were achieved which show a good prospect in various RF-IC’s applications.