Zernike generation with MEMS deformadle mirror actuated by electrostatic piston array

摘要

We report a low-voltage and large-displacement electrostatic deformable mirror for in vivo retinal imaging by adaptive-optics optical coherence tomography. The mirror utilizes an electrostatic piston actuator which allows bottom electrodes to move vertically to keep the gap small to maintain large actuation force at low actuation voltage. An 8-mm-diameter mirror device was fabricated from two components; the mirror part and the actuator part. The parts were assembled with 7-μm-gap defined by an SU-8 layer. We successfully demonstrated operation of the mirror in various Zernike modes.