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Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space

机译：设计和制造用于空间mEms变形镜的波纹膜静电致动器

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A novel Microelectromechanical Systems (MEMS) deformable mirror technology for large, lightweight, segmented space telescopes is being proposed.

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作者
Yang, E. H.; Wiberg, D. V.; Dekany, R. G.;
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年度 2000
页码 1-8
总页数 8
原文格式 PDF
正文语种 eng
中图分类工业技术;
关键词
ACTUATORS; ADAPTIVE OPTICS; DEFORMABLE MIRRORS; ELECTROSTATICS; FABRICATION; HUBBLE SPACE TELESCOPE; MEMBRANES; MICROELECTROMECHANICAL SYSTEMS; MIRRORS; SEGMENTS; SILICON; SINGLE CRYSTALS; SPACEBORNE TELESCOPES; WAFERS; transfer Next Generation Space Telescope; deformable mirrors microelectromechanical systems (MEMS) adaptive optics; electrostatic actuators single crystal silicon membranes wafer-level membrane;

机译：动器;自适应光学;可变形镜;静电;制造; HUBBLE spaCE TELEsCOpE;滤膜;微电子机械系统;后视镜;片段;硅;单晶; spaCEBORNE TELEsCOpEs; WaFERs;转移下一代太空望远镜;可变形镜子微机电系统（mEms）自适应光学;静电致动器单晶硅膜晶圆级膜;

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专利

1. Design, fabrication and characterization of a bulk-PZT-actuated MEMS deformable mirror [J] . Xu XH, Li BQ, Feng Y, Journal of Micromechanics and Microengineering . 2007,第12期

机译：大块PZT驱动的MEMS变形镜的设计，制造和表征
2. Design and fabrication of a single membrane push-pull SPDT RF MEMS switch operated by electromagnetic actuation and electrostatic hold [J] . Il-Joo Cho, Euisik Yoon Journal of Micromechanics and Microengineering . 2010,第3期

机译：通过电磁驱动和静电保持操作的单膜推挽式SPDT RF MEMS开关的设计和制造
3. Mathematical Modeling and Analysis of MEMS Deformable Mirror Actuated by Electrostatic Piston Array [J] . UNO AKIKO, HIRAI YOSHIKAZU, TSUCHIYA TOSHIYUKI, Electrical engineering in Japan . 2018,第2期

机译：静电活塞阵列致动MEMS可变形镜的数学建模与分析
4. Design and Fabrication of Electrostatic Actuators with Corrugated Membranes for MEMS Deformable Mirror in Space [C] . Eui-Hyeok Yang, Dean V.Wiberg, Richard G.Dekany Conference on Imaging Technology and Telescopes 30-31 July 2000 San Diego, USA . 2000

机译：太空中可变形MEMS镜用波纹膜静电执行器的设计与制造
5. Design, fabrication and characterization of MEMS deformable mirrors for ocular adaptive optics. [D] . Park, Hyunkyu. 2009

机译：用于眼睛自适应光学系统的MEMS变形镜的设计，制造和表征。
6. MEMS Deformable Mirrors for Space-Based High-Contrast Imaging [O] . Rachel E. Morgan, Ewan S. Douglas, Gregory W. Allan, 2019

机译：用于天基高对比度成像的MEMS变形镜
7. DESIGN, FABRICATION, AND CHARACTERIZATION OF ELECTROSTATICALLY-ACTUATED SILICON MICRO-MIRRORS [O] . Dylan L Chesbro -1

机译：静电硅微镜的设计，制造和表征
8. Fabrication of micro actuators for a MEMS deformable mirror by membrane transfer [R] . Yang, E. H., Wiberg, D. V., Dekany, R. G. 2001

机译：通过膜转移制造用于mEms可变形镜的微致动器

Design and fabrication of electrostatic actuators with corrugated membranes for MEMS deformable mirror in space

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