A METHOD FOR BONDING A MIRROR PLATE WITH AN ELECTROSTATIC ACTUATOR IN A MEMS MIRROR

摘要

A method for bonding a mirror plate with an electrostatic driving unit in a MEMS(Micro-Electro-Mechanical System) mirror is provided to decrease breakage of the electrostatic driving unit by safely bonding the mirror plate with the electrostatic driving unit through a supporting post and then etching the mirror plate over an area larger than that of the supporting post. In an MEMS mirror having a mirror plate, a driving unit(310) actuating the mirror plate by electrostatic force, and a substrate, which are aligned in order, a method for bonding the mirror plate with the electrostatic driving unit in the MEMS mirror comprises the steps of: leaving a supporting post(320) of a first area in the center of the mirror in order to contact the driving unit to the substrate, during an etching process of the driving unit; patterning a pedestal of a second area wider than the first area, on the bottom surface of the mirror plate; bonding the mirror plate to the driving unit by using the pedestal; and etching the mirror plate in a third area wider than the first area and smaller than the second area, to remove the supporting post.