Parallel plate electrostatic actuation MEMS mirrors

摘要

A microactuator is disclosed including one or more stationary plates formed on a substrate, a mirror base plate on which a mirror is formed, and one or more actuation plates coupled to the mirror base plate by one or more microspring mechanisms. The mirror base plate, the one or more actuation plates and the one or more microspring mechanisms are suspended over the stationary plates by one or more anchors. The stationary plates and the actuation plates are formed of a doped material so as to be electrically conductive. Upon application of a voltage potential between the respective plates, the actuation plates are pulled down toward the stationary plates, thus exerting a drive force on the base mirror plate to actuate the mirror between switching positions.