Optimization and analysis of micro capacitive comb accelerometer

摘要

In this paper the design optimization of capacitive comb accelerometer is discussed. The accelerometer could sense acceleration in x direction which achieves this function implementing several flexible hinges suspending a proof-mass. The flexible hinges are used to enhance the sensitivity and the geometry parameters are optimized in this paper. A static, electrostatic simulation has been conducted. The COMSOL software is used to get the sensitivity and resonant frequency of the accelerometer, the solid mechanics module and electrostatic module are mainly used. The modal analysis simulation result shows that the resonant frequency of the accelerometer is 5240.8Hz. The sensitivity is 4.248mv/g. The total noise equivalent acceleration is 3.567μg/√Hz.