Micromachined comb capacitive accelerometer

摘要

A comb capacity accelerometer including: a substrate, a first mobile electrode free to move with respect to the substrate provided with a set of mobile fingers, a first fixed electrode fixed with respect to the substrate and provided with a set of fixed fingers, each of the mobile fingers being arranged between two contiguous fixed fingers so as to form a first microstructure with interdigitised combs, at least one second mobile electrode associated with at least one second fixed electrode to form at least one second microstructure with interdigitised combs superposed on the first microstructure with interdigitised combs, and the second mobile electrode and the second fixed electrode are etched in the same substrate as the first mobile electrode and the first fixed electrode.