Automated residual gas analyzers (RGAs) can play a very important role in advanced process control (APC), advanced equipment control (AEC), and fault detection and classification (FDC). In particular, automated RGAs can provide needed tool and process information to aid in such analyses. This paper will discuss the role that automated RGA can play in the areas of APC, AEC, and FDC, present a viable automated RGA approach, and lastly, provide an example of this approach to the detection of photoresist.
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