Special Section on the 2017 SEMI Advanced Semiconductor Manufacturing Conference

著录项

• 来源
  《IEEE Transactions on Semiconductor Manufacturing》 |2019年第1期|3-6|共4页
• 作者

  Werbaneth Paul; Bickford Jeanne Paulette; Patterson Oliver D.; Radloff Stefan;

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• 作者单位

  Nor Cal Prod Inc, Singapore, Singapore|Intel, Santa Clara, CA 95054 USA|Hitachi High Technol, Hitachi, Ibaraki, Japan|Tegal Japan Inc, Fujisawa, Kanagawa, Japan|Tegal Corp, Mkt & Applicat, Petaluma, CA 94954 USA|EV Grp, St Florian, Austria|Intevac Inc, Santa Clara, CA 95054 USA|SEMI Adv Semicond Mfg Conf Steering Comm, Saratoga Springs, NY 12866 USA|Amer Vacuum Soc, New York, NY 10038 USA|NCCAVS Tech Symposium, San Jose, CA 95112 USA;

  SEMI Adv Semicond Mfg Conf Steering Comm, Saratoga Springs, NY 12866 USA|GLOBALFOUNDRIES, Essex Jct, VT USA|IBM Microelect, Yorktown Hts, NY USA|IEEE Transact SEMICOND Mfg, ASMC Special Sect, Yorktown Hts, NY USA;

  GLOBALFOUNDRIES, Essex Jct, VT USA|IBM Microelect, Yorktown Hts, NY USA|ASML, San Jose, CA USA|Hermes Microvis, San Jose, CA USA|Lucent Technol, Murray Hill, NJ USA|Agere Syst, Allentown, PA USA|ASMC, Steering Comm, Alexandria, VA USA|ASMC 2014, Alexandria, VA USA;

  Intel, Global Supply Management Technol & Mfg Grp, Chandler, AZ USA|Intel, Capital Supply Chain Org, Chandler, AZ USA|SEMI Adv Semicond Mfg Conf, Saratoga Springs, NY USA;

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• 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词