使用在线RGA的先进半导体生产(英文)

摘要

Automated residual gas analyzers (RGAs) canplay a very important role in advanced process con-trol (APC), advanced equipment control (AEC), andfault detection and classification (FDC). Inparticular, automated RGAs can provide needed tooland process information to aid in such analyses.This paper will discuss the role that automated RGAcan play in the areas of APC, AEC, and FDC, presenta viable automated RGA approach, and lastly, pro-vide an example of this approach to the detectionof photoresist.