Novel UV-assisted Rapid Thermal Annealing of Ferroelectric Materials

摘要

We report the crystallisation of the ferroelectric perovskite phase of modified lead titanate (mPT) from a sol-gel layer at a maximum temperature of 550℃ using ultraviolet-assisted rapid thermal processing (UV-RTP). This compares well to the temperature of 650℃ required to develop the perovskite phase of modified lead titanate using purely thermal rapid thermal processing. The reduction in the maximum processing temperature achieved by UV-assisted rapid thermal processing opens the possibility for wider applications of ferroelectrics on thermally sensitive substrates and structures.